The metal flux from a rotating cylindrical magnetron: A Monte Carlo simulation

Journal of Physics D: Applied Physics

Volumn 41, Issue 20, 2008, Pages

  Van Aeken, K ^a   Mahieu, S ^a   Depla, D ^a  

^a GHENT UNIVERSITY   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ANGULAR DISTRIBUTION; ARGON; COPPER; EXPERIMENTS; INERT GASES; METALS; MONTE CARLO METHODS; ROTATION; SPUTTERING; THREE DIMENSIONAL;

ANALYTICAL FORMULAS; ARGON PRESSURES; BACKGROUND GASSES; BINARY COLLISION APPROXIMATIONS; EXPERIMENTAL CHARACTERIZATIONS; EXPERIMENTAL DEPOSITIONS; ION CURRENT DENSITIES; LOW ENERGY SPUTTERING; LOW PRESSURES; METAL FLUXES; MONTE CARLO SIMULATIONS; QUANTUM CHEMICALS; RATE DISTRIBUTIONS; SCREENED COULOMB INTERACTIONS; SMALL SCALES; SPUTTERED PARTICLES;

MAGNETRONS;

EID: 56349155736     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/20/205307     Document Type: Article

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