Monte Carlo numerical analysis of target erosion and film growth in a three-dimensional sputtering chamber

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 6, 1996, Pages 3108-3123

  Serikov, Vladimir V ^a   Nanbu, Kenichi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030490409     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580179     Document Type: Article

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