Discharge voltage measurements during magnetron sputtering

Surface and Coatings Technology

Volumn 200, Issue 14-15, 2006, Pages 4329-4338

  Depla, Diederik ^a   Buyle, G ^a   Haemers, J ^a   De Gryse, R ^a  

^a GHENT UNIVERSITY   (Belgium)

Author keywords

Current voltage (I V) characteristic; Discharge voltage; Ion induced secondary electron emission

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; ELECTRONS; MAGNETIC FIELD EFFECTS; VOLTAGE MEASUREMENT;

DISCHARGE VOLTAGE; ION INDUCED SECONDARY ELECTRON EMISSION;

MAGNETRON SPUTTERING;

CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; ELECTRONS; MAGNETIC FIELD EFFECTS; MAGNETRON SPUTTERING; VOLTAGE MEASUREMENT;

EID: 33644697733     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.02.166     Document Type: Article

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