Numerical models of the planar magnetron glow discharges

Contributions to Plasma Physics

Volumn 44, Issue 7-8, 2004, Pages 582-588

  Kolev, I ^a   Bogaerts, A ^a  

^a UNIVERSITY OF ANTWERP   (Belgium)

Author keywords

DC Magnetron; Hybrid Model; Numerical Simulation; PIC MC

Indexed keywords

GLOW DISCHARGES; NUMERICAL METHODS; NUMERICAL MODELS;

DC MAGNETRA; HYBRID MODEL; OPERATIONAL CONDITIONS; PIC/MC; PLANAR MAGNETRON;

MAGNETRONS;

EID: 10844256621     PISSN: 08631042     EISSN: None     Source Type: Journal    
DOI: 10.1002/ctpp.200410085     Document Type: Article

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