Nanofabrication by advanced electron microscopy using intense and focused beam

Science and Technology of Advanced Materials

Volumn 9, Issue 1, 2008, Pages

  Furuya, Kazuo ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Cs corrector; Electron holography; Electron beam induced deposition; Iron carbonyl; Nanorod; Scanning transmission electron microscopy; Ultrahigh vacuum

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; ELECTRON GUNS; ELECTRON OPTICS; IRON; IRON COMPOUNDS; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; PARTICLE BEAMS;

CS CORRECTOR; ELECTRON HOLOGRAPHY; ELECTRON-BEAM; ELECTRON-BEAM-INDUCED DEPOSITION; FE(CO)5; FOCUSED BEAMS; FOCUSED ELECTRON BEAMS; GROWTH PROCESSES; HIGH-RESOLUTION TEM; IN-SITU; INSULATOR SUBSTRATES; IRON CARBONYL; MAGNETIC NANOSTRUCTURES; NANO-FABRICATION; NANO-MATERIALS; NANOROD; NANOTREES; SCANNING AND TRANSMISSION ELECTRON MICROSCOPY; SCANNING TRANSMISSION ELECTRON MICROSCOPY; SOLID SUBSTANCES; ULTRAHIGH VACUUM;

ELECTRONS;

EID: 49049094436     PISSN: 14686996     EISSN: None     Source Type: Journal    
DOI: 10.1088/1468-6996/9/1/014110     Document Type: Conference Paper

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