Fabrication of iron oxide nanostructures by electron beam-induced deposition

Materials Science Forum

Volumn 561-565, Issue PART 2, 2007, Pages 1101-1104

  Shimojo, M ^a,b   Takeguchi, M ^a   Mitsuishi, K ^a   Tanaka, M ^a   Furuya, K ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b SAITAMA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Electron beam induced deposition; Iron oxide; Nanofabrication

Indexed keywords

DEPOSITION; ELECTRON BEAMS; FABRICATION; HEAT TREATMENT; NANOSTRUCTURES; NANOTECHNOLOGY;

CARBON REDUCTION; ELECTRON BEAM INDUCED-DEPOSITION; POST DEPOSITION HEAT TREATMENTS;

IRON OXIDES;

EID: 38349122505     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-462-6.1101     Document Type: Conference Paper

References (9)

1. W. F. van Drop, B. van Someren, C. W. Hagen, P. Kruit and P. A. Crozier: Nano Lett. Vol. 5 (2005), p. 1303
2. W. F. van Dorp, C. W. Hagen, P. A. Crozier, B. van Someren and P. Kruit: Microel. Eng. Vol. 83 (2006), p. 1468
3. M. Shimojo, K. Mitsuishi, A. Tameike and K. Furuya: J. Vac. Sci. Technol. B, Vol. 22 (2004), p. 742
4. M. Shimojo, K. Mitsuishi, M. Tanaka, M. Han and K. Furuya: J. Microsc. Vol. 214 (2004), p. 76
5. M. Han, K. Mitsuishi, M. Shimojo and K. Furuya: Phil. Mag., Vol. 84 (2004), p. 1281
6. M. Takeguchi, M. Shimojo and K. Furuya: Nanotechnology, Vol. 16 (2005), p. 1321
7. C. Klinke, J. B. Hannon, L. Gignac, K. Reuter and P. Avouris: J. Phys. Chem. B, Vol. 109 (2005), p. 17787
8. S. Hirano, N. Takeuchi, S. Shimada, K. Masuya, K. Ibe, H. Tsunakawa and M. Kuwabara: J. Appl. Phys., Vol. 98 (2005), p. 094305
9. M. P. Nikiforov, A. A. Vertegel, M. G. Shumsky and J. A. Switzer: Adv. Mater. Vol. 12 (2000), p. 1351