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Volumn 46, Issue 9 B, 2007, Pages 6247-6249
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Mechanisms of crystalline iron oxide formation in electron beam-induced deposition
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Author keywords
Electron beam induced deposition; Iron oxide; Iron pentacarbonyl; Nanofabruication; Oxygen; Water vapor
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Indexed keywords
ADDITION REACTIONS;
CRYSTALLINE MATERIALS;
DEPOSITION;
ELECTRON BEAMS;
NANOTECHNOLOGY;
OXYGEN;
WATER VAPOR;
CARBON CONTENT;
ELECTRON BEAM-INDUCED DEPOSITION;
IRON OXIDES;
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EID: 34648819063
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.46.6247 Document Type: Article |
Times cited : (10)
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References (12)
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