TEM sample preparation using a new nanofabrication technique combining electron-beam-induced deposition and low-energy ion milling

Microscopy and Microanalysis

Volumn 12, Issue 6, 2006, Pages 545-548

  Mitsuishi, Kazutaka ^a   Shimojo, Masayuki ^b   Tanaka, Miyoko ^a   Takeguchi, Masaki ^a   Song, Minghui ^a   Furuya, Kazuo ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b SAITAMA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Electron beam induced deposition; Ion beam milling; Nanofabrication; TEM sample preparations

Indexed keywords

EID: 33947493358     PISSN: 14319276     EISSN: 14358115     Source Type: Journal    
DOI: 10.1017/S143192760606065X     Document Type: Conference Paper

References (11)

1. HAN, M., MITSUISHI, K., SHIMOJO, M. & FURUYA, K. (2004). Nanostructure characterization of tungsten-containing nano-rods deposited by electron-beam-induced chemical vapour decomposition. Phil Mag 84, 1281-1289.
2. 6 at 2 to 20 keV and its applications. J Vac Sci Technol B 14, 662-673.
3. ISHIDA, M., FUJITA, J., ICHIHASHI, T., OCHIAI, Y., KAITO, T. & MATSUI, S. (2003). Focused ion beam-induced fabrication of tungsten structures. J Vac Sci Technol B 21, 2728-2731.
4. KATO, N.I. (2004). Reducing focused ion beam damage to transmission electron microscopy samples. J Electron Microsc 53, 451-458.
5. KAWASAKI, M., YOSHIOKA, T. & SHIOJIRI, M. (1999). A new specimen preparation method for cross-section TEM using diamond powders. J Electron Microsc 48, 131-137.
6. KOOPS, H.W.P., KRETZ, J., RUDOLPH, M., WEBER, M., DAHM, G. & LEE, K.L. (1994). Characterization and application of materials grown by electron-beam-induced deposition. Jpn J Appl Phys 33, 7099-7107.
7. MATSUI, S. & ICHIHASHI, T. (1988). Electron-beam-induced chemical vapor-deposition by transmission electron-microscopy. Appl Phys Lett 53, 842-844.
8. MITSUISHI, K., SHIMOJO, M., HAN, M. & FURUYA, K. (2003). Electron-beam-induced deposition using a subnanometer-sized probe of high-energy electrons. Appl Phys Lett 83, 2064-2066.
9. MITSUISHI, K., SHIMOJO, M., TANAKA, M., TAKEGUCHI, M. & FURUYA, K. (2005). Resolution in new nanofabrication technique combining electron-beam-induced deposition and lowenergy ion milling. Jpn J Appl Phys 44, 5627-5630.
10. TANAKA, M., SHIMOJO, M., MITSUISHI, K. & FURUYA, K. (2004). The size dependence of the nano-dots formed by electron-beaminduced deposition on the partial pressure of the precursor. Appl Phys A 78, 543-546.
11. WANG, Z., KATO, T., HIRAYAMA, T., KATO, N., SASAKI, K. & SAKA, H. (2005). Suraface damage induced by focused-ion-beam milling in a Si/Si p-n junction cross-sectional specimen. Appl Surf Sci 241, 80-86.