Formation of iron nano-dot arrays by electron beam-induced deposition using an ultrahigh vacuum transmission electron microscope

Journal of Crystal Growth

Volumn 275, Issue 1-2, 2005, Pages

  Tanaka, M ^a   Shimojo, M ^a,b   Takeguchi, M ^a   Mitsuishi, K ^a   Furuya, K ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

A1. Characterization; A3. Metalorganic chemical vapor deposition; B1. Nanomaterials

Indexed keywords

AMORPHOUS MATERIALS; CHEMICAL VAPOR DEPOSITION; CRYSTAL ORIENTATION; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; MIXTURES; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

AMORPHOUS STRUCTURES; CARBON MIXTURES; ELECTRON BEAM-INDUCED DEPOSITION (EBID); PRECURSOR GASES;

NANOSTRUCTURED MATERIALS;

EID: 15844393473     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2004.11.337     Document Type: Conference Paper

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