Dynamic Monte Carlo simulation on the electron-beam-induced deposition of carbon, silver, and tungsten supertips

Microscopy and Microanalysis

Volumn 12, Issue 6, 2006, Pages 549-552

  Liu, Zhi Quan ^a   Mitsuishi, Kazutaka ^a   Furuya, Kazuo ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Electron scattering; Electron beam induced deposition (EBID); Fabrication; Monte Carlo simulation; Primary electron; Secondary electron; Spatial resolution; Supertip

Indexed keywords

EID: 33947535159     PISSN: 14319276     EISSN: 14358115     Source Type: Journal    
DOI: 10.1017/S1431927606060648     Document Type: Conference Paper

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