Dependence on substrate topography of growth of nanosized dendritic structures in an electron-beam-induced deposition process

Physica E: Low-Dimensional Systems and Nanostructures

Volumn 29, Issue 3-4, 2005, Pages 575-579

  Song, Minghui ^a   Mitsuishi, Kazutaka ^a   Furuya, Kazuo ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Dendrite; Electron beam induced deposition; Nanofabrication; Nanostructure; Transmission electron microscopy

Indexed keywords

SUBSTRATES; SURFACE TOPOGRAPHY; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRON BEAM INDUCED DEPOSITION; NANOSIZED DENDRITIC; SUBSTRATE TOPOGRAPHY;

ELECTRON BEAMS;

EID: 26944470748     PISSN: 13869477     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physe.2005.06.030     Document Type: Conference Paper

References (11)

1. H.W.P. Koops, R. Weiel, D.P. Kern, and T.H. Baum J. Vac. Sci. Technol. B 6 1988 477
2. H.W.P. Koops, J. Kretz, M. Rudolph, M. Weber, G. Dahm, and K.L. Lee Jpn. J. Appl. Phys. Part 1 33 1994 7099
3. P.C. Hoyle, J.R.A. Cleaver, and H. Ahmed J. Vac. Sci. Technol. B 14 1996 662
4. H. Hiroshima, N. Suzuki, N. Ogawa, and M. Komuro Jpn. J. Appl. Phys. 38 1999 7135
5. K.T. Kohlmann-von Platen, J. Chiebek, M. Weiss, K. Reimer, H. Oertel, and W.H. Brünger J. Vac. Sci. Technol. B 11 1993 2219
6. S. Matsui, and T. Ichihashi Appl. Phys. Lett. 53 1988 842
7. K. Mitsuishi, M. Shimojo, M. Han, and K. Furuya App. Phys. Lett. 83 2003 2064
8. T.E. Allen, R.R. Kunz, and T.M. Mayer J. Vac. Sci. Technol. B 6 1988 2057
9. M. Song, K. Mitsuishi, M. Tanaka, M. Takeguchi, M. Shimojo, and K. Furuya Appl. Phys. A 80 2005 1431
10. M. Song, H. Hashimoto, Y. Yokota, and M. Awaji Scanning 12 1990 29
11. J.W. Coburn, and H.F. Winters J. Appl. Phys. 50 1979 3189