Fabrication of free-standing tungsten-nanowhiskers on SiO2 substrates with electron-beam induced deposition

Materials Transactions

Volumn 48, Issue 10, 2007, Pages 2551-2555

  Song, Minghui ^a   Mitsuishi, Kazutaka ^a   Furuya, Kazuo ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Beam induced effect; Electron beam induced deposition; Nanofabrication; Nanostructure; Tungsten nanowisker

Indexed keywords

CRYSTAL WHISKERS; DEPOSITION; ELECTRON BEAMS; SILICA; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY; TUNGSTEN;

BEAM INDUCED EFFECT; BODY CENTRED CUBIC STRUCTURE; ELECTRON BEAM INDUCED DEPOSITION; TUNGSTEN NANOWISKERS;

NANOSTRUCTURED MATERIALS;

EID: 36548998883     PISSN: 13459678     EISSN: None     Source Type: Journal    
DOI: 10.2320/matertrans.MD200717     Document Type: Conference Paper

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