SCOPUS 정보 검색 플랫폼

Journal of Photopolymer Science and Technology

Volumn 15, Issue 3, 2002, Pages 481-486

Step and flash imprint lithography: An efficient nanoscale printing technology

(6) Bailey, T C a Johnson, S C a Sreenivasan, S V a Ekerdt, J G a Willson, C G a,b Resnick, D J c

a The University of Texas at Austin (United States)

b UNIVERSITY OF TEXAS AT AUSTIN (United States)

c MOTOROLA INC (United States)

Author keywords

Acrylate; Imprint; Lithography; Nanoimprint; Step and flash

Indexed keywords

ORGANOSILICON DERIVATIVE; POLYMER;

ARTICLE; DEVICE; ELECTRONICS INDUSTRY; LITHOGRAPHY; NANOPARTICLE; OPTICS; PRESSURE; PRINTING; ROOM TEMPERATURE; SCANNING ELECTRON MICROSCOPY; SURFACE PROPERTY; ULTRAVIOLET RADIATION; VISCOSITY;

EID: 0036355561 PISSN: 09149244 EISSN: None Source Type: Journal
DOI: 10.2494/photopolymer.15.481 Document Type: Article

Times cited : (77)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.