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Liu, Y.1
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Sokolov, J.7
Dai, K.H.8
Huang, E.9
Mansky, P.10
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Chaikin, P.M.13
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28
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0009717819
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note
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30
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0009698158
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Si wafers were purchased from Crystec (Berlin, Germany)
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35
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0009745987
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For the simulation the program TEMsim 1.6 developed. For reference
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Hoffman, J.1
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0009668994
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Dissertation, Universität Bayreuth
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Elbs, H.1
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