Silicon nitride membrane substrates for the investigation of local structure in polymer thin films

Polymer

Volumn 39, Issue 16, 1998, Pages 3871-3875

  Morkved, T L ^a   Lopes, W A ^a   Hahm, J ^a   Sibener, S J ^a   Jaeger, H M ^a  

^a UNIVERSITY OF CHICAGO   (United States)

Author keywords

Block copolymers; Silicon nitride membrane substrates; Thin film morphology

Indexed keywords

ATOMIC FORCE MICROSCOPY; BLOCK COPOLYMERS; COMPOSITION; ELLIPSOMETRY; FILM PREPARATION; MORPHOLOGY; OPTICAL MICROSCOPY; POLYMERIC MEMBRANES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

POLYMER THIN FILMS; SILICON NITRIDE MEMBRANE SUBSTRATES;

SILICON NITRIDE;

EID: 0032121649     PISSN: 00323861     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0032-3861(97)10218-X     Document Type: Article

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