Lithographic applications of highly metallized polyferrocenylsilanes

Macromolecular Symposia

Volumn 196, Issue , 2003, Pages 71-76

  Clendenning, Scott B ^a   Manners, Ian ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

Lithography; Nanopatterned materials; Organometallic polymers; Polyferrocenylsilanes; Resists

Indexed keywords

CERAMIC MATERIALS; IRON COMPOUNDS; LITHOGRAPHY; METALLIZING; NANOSTRUCTURED MATERIALS; SILANES;

CERAMIC PRECURSORS;

METALLORGANIC POLYMERS;

METAL DERIVATIVE; ORGANOMETALLIC COMPOUND; POLYFERROCENYLSILANE; SILANE DERIVATIVE; UNCLASSIFIED DRUG;

ARTICLE; CERAMICS; CHEMICAL STRUCTURE; MOLECULAR WEIGHT; NANOPARTICLE; PARTICLE SIZE; STRUCTURE ANALYSIS; TECHNIQUE;

EID: 0042346387     PISSN: 10221360     EISSN: None     Source Type: Journal    
DOI: 10.1002/masy.200390178     Document Type: Article

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