Microfabrication: LIGA-X and applications

Applied Surface Science

Volumn 164, Issue 1-4, 2000, Pages 97-110

  Kupka, R K ^a   Bouamrane, F ^a   Cremers, C ^a   Megtert, S ^a  

^a UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

Diffraction; HARMST; High aspect ratio structures; LIGA; MEMS; Microchannel plates; Microfabrication; Microtechnology; ORO; Surface lenses; X ray

Indexed keywords

EID: 0034274289     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(00)00354-8     Document Type: Article

References (108)

1. P. Rai-Choudhury, Handbook of Microlithography, Micromachining and Microfabrication 1-2 SPIE Optical Engineering Press, 1997.
2. G.T.A. Kovacs, Micromachined Transducers Sourcebook, McGraw-Hill, New York, 1998.
3. W. Lang, H. Sandmeier, Jpn. J. Appl. Phys. Pt. 1, Reg. Pap. Short Notes and Rev. Pap. 37 (12B) (1998) 7047-7051.
4. A. Rasmussen, M.E. Zaghloul, IEEE Circuits and Devices 14 (1998) 12-25.
5. E.W. Becker, W. Ehrfeld, P. Hagmann, A. Maner, D. Münchmeier, Microelectronic Engineering 4 (1986) 35-56.
6. S. Megtert, Z.W. Liu, R. Kupka, A. Labeque, V. Casses, S. Basrour, P. Bernede, Proceedings of AIP Conference vol. 392, 1996, pp. 745-748.
7. H. Guckel, Proceedings of the IEEE 86 (8) (1998) 1586-1593.
8. W. Menz, Sensors and Actuators, A: Physical 54 (1-3) (1996) 785-789.
9. L.T. Romankiw, Electrochimica Acta 42 (20-22) (1997) 2985-3005.
10. J.M. Bustillo, R.T. Howe, R.S. Muller, Proceedings of the IEEE 86 (8) (1998) 1552-1574.
11. S. Megtert, A. Labeque, L. Zewen, H. Dexpert, R. Comes, M.F. Ravet, H. Launois, S. Ballandras, W. Daniau, S. Basrour, M. Roulliay, P. Blind, D. Hauden, Jounal de Physique IV, Colloque C9 4 (1994) 269-272.
12. W. Ehrfeld, D. Münchmeyer, Nuclear Instruments & Methods in Physics Research A 303 (1991) 523-531.
13. H. Lorenz, M. Despont, N. Fahrni, J. Brugger, P. Vettiger, P. Renaud, Sensors and Actuators, A: Physical 64 (1) (1998) 33-39.
14. R.K. Kupka, S. Megtert, M. Roulliay, F. Bouamrane, Proceedings of SPIE 3512 (1998) 271-276.
15. B.L. Henke, E.M. Gullikson, J.C. Davies, Atomic Data and Nuclear Tables 54 (2) (1993) 181-343.
16. Y. Chen, R.K. Kupka, F. Carcenac, D. Decanini, M.F. Ravet, H. Launois, Journal of Vacuum Science & Technology, B 12 (6) (1994) 3959-3964.
17. R.K. Kupka, Y. Chen, R. Planel, H. Launois, Microelectronic Engineering 27 (1995) 311-316.
18. Z. Liu, F. Bouamrane, R.K. Kupka, A. Labeque, S. Megtert, Journal of Micromechanics and Microengineering 8 (1998) 293-300.
19. D.L. Polla, L.F. Francis, Annual Review of Material Science 28 (1998) 563-597.
20. C.K. Malek, V. Saile, H. Manohara, B. Craft, Journal of Synchrotron Radiation 5 (1998) 1095-1098, May.
21. S. Megtert, F.J. Pantenburg, S. Achenbach, R.K. Kupka, J. Mohr, Proceedings of SPIE 3680 (1999) 917-923.
22. W. Bacher, P. Bley, H. Hein, KfK-Nachrichten 23 (2-3) (1991) 76-83.
23. S. Ballandras, W. Daniau, S. Basrour, L. Robert, M. Roulliay, P. Blind, P. Bernede, D. Robert, S. Roher, D. Hauden, S. Megtert, A. Labeque, L. Zewen, H. Dexpert, R. Comes, F. Rousseaux, M.F. Ravet, H. Launois, Journal of Michromechanics and Microengineering 5 (1995) 203-208.
24. M. Neumann, F.J. Pantenburg, M. Rohde, M. Sesterhenn, Microelectronics Journal 28 (1997) 349-355.
25. H. Fujita, Proceedings of the IEEE 86 (8) (1998) 1721-1732.
26. R. Ruprecht, T. Hanemann, V. Plotter, J. Haußelt, Microsystem Technologies 5 (1998) 44-48.
27. W. Ehrfeld, V. Hessel, H. Löwe, Ch. Schulz, L. Weber, Microsystem Technologies 5 (1999) 105-112.
28. Proceedings of SPIE vol. 3511-3515 (1998), vol. 3606, 3680, 3874-3880 (1999).
29. Proceedings of SPIE vol. 3511-3515 (1998), vol. 3606, 3680, 3874-3880 (1999).
30. Proceedings of Conferences: HARMST', TRANSDUCERS', MICROMACHINE', MEMS'.
31. A. Manz, H. Becker (Eds.), Topics in Current Chemistry vol. 194, 1998.
32. H. Guckel, K.J. Skrobis, T.R. Chnstenson, J. Klein, S. Han, B. Choi, E.G. Lovell, T.W. Chapman, Journal of Micromechanics 1 (1991) 135-138.
33. V.D. Samper, A.J. Sangster, R.L. Reuben, U. Wallrabe, Journal of Microelectromechanics Systems 7 (2) (1998) 214-218.
34. V.D. Samper, A.J. Sangster, R.L. Reuben, U. Wallrabe, Journal of Microelectromechanics Systems 8 (1) (1999) 115-123.
35. S. Nakamura, K. Suzuki, M. Ataka, H. Fujita, H. Basrour, V. Soumann, M. Labachelerie, W. Daniau, Microsystem Technologies 5 (2) (1998) 69-71.
36. H. Guckel, K. Fischer, E. Stiers, Proceedings of MEMS'98, Heidelberg, Germany, 1998, pp. 414-418.
37. H. Guckel, T. Earles, J. Klein, J.D. Zook, T. Ohnstein, Sensors and Actuators, A: Physical 53 (1-3) (1996) 386-391.
38. K. Deng, A.S. Dewa, D.C. Ritter, C. Bonham, H. Guckel, Microsystem Technologies 4 (4) (1998) 163-167.
39. J. Fahrenberg, Th. Schaller, W. Bacher, A. El-Kholi, W.K. Schomburg, Microsystems Technologies 2 (1996) 174-177.
40. W. Bacher, K. Bade, B. Matthis, M. Saumer, R. Schwarz, Microsystems Technologies 4 (4) (1998) 117-119.
41. S. Ballandras, W. Dainau, S. Basrour, D. Robert, S. Rocher, L. Robert, P. Blind, P. Bernede, S. Megtert, Z. Liu, A. Labeque, M.F. Ravet, D. Hauden, Sensors and Actuators, A 58 (1997) 265-272.
42. B. Choi, G. Lee, Sensors and Actuators, A: Physical 69 (2) (1998) 192-198.
43. L. Yao, E. Chowanietz, M. Mccormick, A. Lees, Proceedings of the Institution of Mechanical Engineers Part D, Journal of Automobile Engineering 212 (D4) (1998) 319-322.
44. A. Bertsch, H. Lorenz, P. Renaud, Sensors and Actuators 73 (1999) 14-23.
45. E.M.J. Verpoorte, B.H. van der Schoot, S. Jaenneret, A. Manz, H.M. Widmer, N.F. de Rooij, Journal of Micromechanics and Microengineering 4 (1994) 246.
46. R.W. Wegeng, C.J. Call, M.K. Drost, Proceedings of the Spring National Meeting AIChE New Orleans, 1996, pp. 1-13.
47. A. Ruzzu, J. Fahrenberg, M. Heckele, Th. Schaller, Microsystem Technologies 4 (1998) 128-131.
48. T.W. Tsuei, R.L. Wood, C. Khan Malek, M.M. Donnelly, R.B. Fair, Microsystem Technologies 4 (1998) 201-204.
49. V.D. Samper, A.J. Sangster, U. Wallrabe, R.L. Reuben, J.K. Grund, Journal of Microelectromechanical Systems 7 (4) (1998) 423-427.
50. W. Bier, W. Keller, G. Linder, D. Seidel, Microstractures Sensors and Actuators (1990) 19.
51. W. Ehrfeld, K. Golbig, V. Hessel, H. Löwe, T. Richter, Jahrbuch der GVC, VDI-Verlag, Germany, 1997, pp. 102-116.
52. W. Ehrfeld, K. Golbig, V. Hessel, H. Löwe, T. Richter, Industrial & Engineering Chemistry Research 38 (1999) 1075-1082.
53. J.M. Köhler, M. Zieren, Thermochimica Acta 310 (1998) 25-35.
54. M. Koch, C.G.J. Schabmueller, A.G.R. Evans, A. Brannschweiler, Sensors and Actuators 74 (1999) 207-210.
55. H. Krummradt, U. Koop, J. Stoldt, Chemie-Ingenieur-Technik 70 (9) (1998) 1074.
56. K.-P. Kämper, W. Ehrfeld, J. Döpper, V. Hessel, H. Lehr, H. Löwe, T. Richter, A. Wolf, Proceedings of the IEEE MEMS'97, Nagoya, Japan, 1997.
57. R.A. Mathies, A.T. Woolley, Analytical Chemistry 67 (20) (1995) 3676.
58. T.S. Sammarco, Y.D. Fields, B.N. Johnson, D.K. Jones, D.T. Burke, C.H. Mastrangelo, M.A. Burns, Proceedings of the 2nd International Symposium on Miniaturized Total Analysis Systems (μ-TAS), Basel, Switzerland, 1996, pp. 150-153.
59. M.A. Burns, B.N. Johnson, S.N. Brahmasandra, K. Handique, J.R. Webster, M. Krishnan, T.S. Sammarco, F.P. Man, D. Jones, D. Heldsinger, V. Namasivayam, C.H. Mastrangelo, D.T. Burke, Science 282 (1998) 484-487.
60. S.M. Ford, B. Karr, S. McWorther, J. Davies, S.A. Soper, M. Klopf, G. Calderon, V. Saile, Journal of Microcolumn Seperations 10 (5) (1998) 413-422.
61. U. Wallrabe, P. Ruther, T. Schaller, W.K. Schomburg, The International Journal of Artificial Organs 21 (3) (1998) 137-146.
62. U. Wallrabe, J. Mohr, I. Tesan, W. Wulff, Proceedings of the IEEE MEMS'96, 1996, pp. 462-466, IEEE Cat. No.96CH35856.
63. A. Ruzzu, J. Fahrenberg, M. Müller, C. Rembe, U. Wallrabe, Proceedings of MEMS'98, 1998, pp. 499-503.
64. U. Gebhard, R. Günter, E. Just, P. Ruther, Proceedings of Microsystem Technologies'96, VDE Verlag, Berlin, 1996, pp. 609-614.
65. K.F. Weibezahn, G. Knedlitschek, H. Dertinger, W. Bier, T. Schaller, K. Schubert, Journal of Experimental & Clinical Cancer Research 41-42 (1995) .
66. S. Valette, Journal of Michromechanics and Microengineering 5 (1995) 74-76.
67. J. Mohr, B. Anderer, W. Ehrfeld, Sensors and Actuators, A: Physical 27 (1-3) (1991) 559-563.
68. H. Staerk, A. Wiessner, C. Muller, J. Mohr, Review of Scientific Instruments 67 (7) (1996) 2490-2495.
69. J.A. Cox, D.C. Dobson, T. Ohnstein, J.D. Zook, Optical Engineering 37 (11) (1998) 2878-2884.
70. T.R. Ohnstein, Proceedings of Transducer '95, Stockholm, Sweden, June, 1995, pp. 324-327.
71. H.D. Bauer, W. Ehrfeld, T. Paatzsch, Proceedings of MOEMS'97, Nara, Japan, 1997, pp. 215-219.
72. A. Rogner, W. Ehrfeld, D. Munchmeier, P. Bley, C. Burbaum, J. Mohr, Journal of Micromechanics and Microengineering, 1 (1991) 167-170.
73. J. Sochtig, H. Schift, Microsystem Technology 4 (3) (1998) 132-134.
74. K.H. Brenner, M. Kufner, J. Moisel, A. Müller, S. Sinzinger, M. Testorf, J. Göttert, J. Mohr, Applied Optics 32 (32) (1993) 6464-6469.
75. R.K. Kupka, F. Bouamrane, S. Megtert, Proceedings of SPIE 3680 (1999) 508-517.
76. R.S. Muller, K.Y. Lau, Proceedings of the IEEE 86 (8) (1998) 1705-1720.
77. P. Ruther, B. Gerlach, J. Gottert, M. Ilie, J. Mohr, A. Muller, C. Ossmann, Applied Optics 36 (22) (1997) 5129-5133.
78. R. Johnson, I. Cook, R. Gringsby, Microsystem Technologies 5 (2) (1998) 62-64.
79. R.K. Kupka, M. Roulliay, F. Bouamrane, S. Megtert, Proceedings of SPIE 3512 (1998) 398-409.
80. M. Gerner, K. Holldack, R. Lüttge, M. Schmidt, Microsystem Technologies 4 (1998) 184-186.
81. R.H. Liu, M.J. Vasile, D.J. Beebe, Journal of Microelectromechamcal Systems 8 (2) (1999) 146-151.
82. J.J. Song, S. Bajikar, F. Decarlo, Y.W. Kang, R.L. Kustom, D.C. Mancini, A. Nassiri, B. Lai, A.D. Feinerman, V. White, Microsystem Technologies 4 (1998) 193-196.
83. L.R. Turner, A. Nassiri, F.E. Mills, S. Kim, A. Feinerman, IEEE Transactions on Magnetics 32 (4) (1996) 2602-2604.
84. A. Nassiri, R.L. Kustom, Y.W. Kang, J. Song, Nuclear Instruments & Methods in Physical Research, A: Accel. Spectrom. Detect, and Associated. Equip. 375 (1-3) (1996) ABS46-ABS47.
85. T.L. Willke, S.S. Gearhart, IEEE Transactions on Microwave Theory and Techniques 45 (10) (1997) 1681-1688.
86. Y. Cheng, B.Y. Shew, C.H. Lin, Proceedings of HARMST'99, Chiba, Japan, 1999.
87. C.T.C. Nguyen, L.P.B. Katehi, G.M. Rebeiz, Proceedings of the IEEE 86 (8) (1998) 1756-1768.
88. G. Feiertag, W. Ehrfeld, H. Freimuth, H. Kolle, L. Lehr, M. Schmidt, M.M. Sigalas, C.M. Soukoulis, G. Kiriakidis, T. Pedersen, J. Kühl, W. König, Applied Physics Letters 71 (1997) 1441-1443.
89. Y. Cheng, B.Y. Chew, C.H. Lin, T.P. Hung, G.J. Hwang, C.L. Kuo, S.C. Tseng, D.S. Lee, G.L. Vhang, Digest of Technical papers, TRANSDUCER '99, Sendai, Japan, 1999, pp. 1452-1455.
90. L. Fan, H. Last, R. Wood, B. Dudley, C.K. Malek, Z. Ling, Microsystem Technologies 4 (4) (1998) 168-171.
91. Y. Cheng, Proceedings of HARMST'99, Tokyo, 1999, pp. 126-127.
92. P. Birke, W. Weppner, Electrochimica Acta 42 (20-22) (1997) 3375-3384.
93. M. Gad-le-Hak, Journal of Fluids Engineering 121 (1999) 5-33.
94. L. Löfdahl, M. Gad-le-Hak, Progress in Aerospace Science 35 (1999) 101-203.
95. R.K. Kupka, "Lithographie par rayons-X à très haute résolution: Contribution à l'étude de la fabricationde structures nanométriques AlGaAs/GaAs par implantation ionique. Caractérisation des effets optiques et quantiques". Thèse de doctorat, Université Paris XI, Orsay, France, Dec. 1995.
96. S.K. Sinha, E.B. Sirota, S. Garoff, H.B. Stanley, Physical Review B 38 (4) (1988) 2297-2311.
97. J. Daillant, O. Belorgey, Journal of Chemical Physics 97 (8) (1992) 5824-5836.
98. P.T. Lan, S.Y. Chow, L.L. Chen, D. Gemmill, Computer-Aided Design 29 (1) (1997) 53-62.
99. A. Bertsch, J.Y. Yezequel, J.C. André, Journal of Photochemistry and Photobiology, A: Chemistry 107 (1-3) (1997) 275-281.
100. O. Lehman, M. Stuke, Applied Physics A 53 (1991) 343-345.
101. J. Kiihamaki, S. Franssila, Physica Scripta T79 (1999) 250-254.
102. A.M. Hynes, H. Ashraf, J.K. Bhardwaj, J. Hopkins, I. Johnston, J.N. Shepherd, Sensors and Actuators, A: Physical 74 (1-3) (1999) 13-17.
103. F. Schrempel, F. Witthuhn, Nuclear Instrument and Methods of Physical Research, Section B: Beam Int. with Mat. and Atoms 139 (1-4) (1998) 363-371.
104. F. Schrempel, W. Witthuhn, Nuclear Instruments and Methods in Physical Research, Section B: Beam Interact, with Mat. and Atoms 132 (3) (1997) 430-438.
105. D. Raynaerts, W. Meeusen, H. Vanbrussel, Sensors and Actuators, A: Physical 67 (1-3) (1998) 159-165.
106. M.C. Wanke, O. Lehman, K. Müller, A. Wen, M. Stake, Science 275 (1997) 1284-1286.
107. J. Arnold, U. Dasbach, W. Ehrfeld, K. Hesch, H. Löwe, Applied Surface Science 86 (1995) 251-258.
108. F.J. Pantenburg, S. Megtert, S. Aschenbach, R. Kupka, J. Mohr, Proceedings of HARMST'99, Chiba, Japan, 1999.