Processing and characterization of piezoelectric materials and integration into microelectromechanical systems

Annual Review of Materials Science

Volumn 28, Issue 1, 1998, Pages 563-597

  Polla, Dennis L ^a   Francis, Lorraine F ^a  

^a University of Minnesota   (United States)

Author keywords

Actuators; Ferroelectric; MEMS; Sensors

Indexed keywords

ACOUSTIC EMISSIONS; BIOSENSORS; DIELECTRIC FILMS; FERROELECTRIC MATERIALS; LINEAR MOTORS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; SILICON SENSORS; STEPPING MOTORS; THIN FILMS; VIBRATIONS (MECHANICAL);

MICROPUMPS; MOLECULAR-RECOGNITION BIOSENSORS;

PIEZOELECTRIC MATERIALS;

EID: 0031623579     PISSN: 00846600     EISSN: None     Source Type: Journal    
DOI: 10.1146/annurev.matsci.28.1.563     Document Type: Article

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