In the flow with MEMS

IEEE Circuits and Devices Magazine

Volumn 14, Issue 4, 1998, Pages 12-25

  Rasmussen, Angela ^a   Zaghloul, Mona E ^a  

^a George Washington University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANALOG TO DIGITAL CONVERSION; ANEMOMETERS; BRIDGE CIRCUITS; CMOS INTEGRATED CIRCUITS; FLOW MEASUREMENT; FLOW OF FLUIDS; FLUIDS; MICROMACHINING; SEMICONDUCTOR DEVICE MANUFACTURE; SENSORS;

FLOW ANALYSIS; FLOW SENSORS; THERMAL ANEMOMETER; WHEATSTONE BRIDGE;

MICROELECTROMECHANICAL DEVICES;

EID: 0032120220     PISSN: 87553996     EISSN: None     Source Type: Journal    
DOI: 10.1109/101.708474     Document Type: Article

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