Materials of LIGA technology

Microsystem Technologies

Volumn 5, Issue 3, 1999, Pages 105-112

  Ehrfeld, W ^a   Hessel, V ^a   Lowe H ^a   Schulz, Ch ^a   Weber, L ^a  

^a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000001239     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050150     Document Type: Article

References (22)

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2. Despont M; Lorenz M; Fahrni N; Brugger J; Renaud P; Vettiger P (1997) High-aspect-ratio, ultrathick, negative-tone near-UV photoresist for MEMS applications. Proc IEEE MEMS-97 Workshop, Nagoya: 518
3. Ehrfeld W; Bley P; Götz F; Hagmann P; Maner A; Mohr J; Moser HO; Münchmeyer D; Schelb W; Schmidt D; Becker EW (1987) Fabrication of microstructures using the LIGA process. in: Proc. IEEE Micro Robots and Teleoperators Workshop, Hyannis (Eds Gabriel KJ; Trimmer WSN) p. 1, IEEE Katalog No: 87 TH 0204-8
4. Ehrfeld W; Becker EW (1987) Das LIGA-Verfahren zur Herstellung von Mikrostrukturkörpern mit großem Aspektverhältnis und großer Strukturhöhe, KfK-Nachrichten 19: 167
5. Ehrfeld W; Bley P; Münchmeyer D (1989) Mikrofertigung durch Röntgenlithographie mit Synchrotronstrahlung. In: Anwendungsspektrum moderner supraleitender Kompaktquellen für Synchrotronstrahlung am Beispiel der konzipierten Karlsruher Quelle (KSSQ), KfK-Bericht 4492 (Ed Moser HO), Forschungszentrum Karlsruhe: 112
6. Ehrfeld W; Abraham M; Ehrfeld U; Lacher M; Lehr H (1994) Materials for LIGA products, Proc. 7th IEEE Int Workshop on Micro Electro Mechanical Systems, Kanagawa, Japan
7. Ehrfeld W; Lehr H (1995) Deep X-ray lithography for the production of three-dimensional microstructures from metals, polymers and ceramics. Radiat Phys Chem 45: 349
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10. Freimuth H; Hessel V; Lacher M; Stadel M (1996a) Abformung keramischer Mikrostrukturen durch die LIGA-Technik, Keram. Zeitschrift 48: 1112
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17. Nuyken O; Dahn U; Ehrfeld W; Hessel V; Hesch K; Landsiedel J; Diebel J (1997) Synthesis of polysulfides containing the triazeno group and their application as photoresists in excimer laser photoablation. Chem Mater 9: 485
18. Richter Th; Ehrfeld W; Wolf A; Gruber H-P; Wörz O (1997) Microreactors in highly corrosion and heat resistant materials fabricated by various microelectro discharge machining techniques. Proc 1st Int Conf Microreaction Technology, Berlin, Heidelberg, New York; Springer, p 158
19. Schenk R; Halle O; Müllen K; Ehrfeld W; Schmidt M (1997) Highly sensitive resist material for deep X-ray lithography. Microelectronic Eng 35: 105
20. Weber L; Ehrfeld W; Freimuth H; Lacher M; Lehr H; Pech B (1996) Micromoulding - a powerful tool for the large scale production of precise microstructures. Proc SPIE Symp Micromachining and Microfabrication, 2879, Austin
21. Wolf A; Ehrfeld W; Lehr H; Michel F (1996) Micro electro discharge machining as a technology in micromachining. Proc SPIE Symp Micromachining and Microfabrication, 2879, Austin
22. Wolf A; Ehrfeld W; Lehr H; Michel F; Nienhaus M (1997) Combining LIGA and electro discharge machining for the generation of complex micro structures in hard materials. Proc 9-IPES/UME 4, Braunschweig