Surface-micromachined microoptical elements and systems

Proceedings of the IEEE

Volumn 86, Issue 8, 1998, Pages 1705-1720

  Muller Kam, Richard S ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Actuated micromirrors; Bar code reader; Fiber optic components; Gratings; Laser fiber coupler; Optical scanners

Indexed keywords

DIFFRACTION GRATINGS; FIBER OPTIC COMPONENTS; MICROELECTROMECHANICAL DEVICES; MIRRORS; OPTICAL DEVICES; OPTICAL FIBER COUPLING; OPTICAL SYSTEMS; SILICON WAFERS;

ACTUATED MICROMIRROR; BAR CODE READER; MICROELECTROMECHANICAL SYSTEMS; OPTICAL SCANNER;

MICROMACHINING;

EID: 0032136277     PISSN: 00189219     EISSN: None     Source Type: Journal    
DOI: 10.1109/5.704276     Document Type: Article

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