P-LIGA: 3D-integration of microstructures with curved surfaces by deep ion irradiation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 139, Issue 1-4, 1998, Pages 363-371

  Schrempel, F ^a   Witthuhn, W ^a  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

Ion irradiation; LIGA; Lithography; Particle radiation; PMMA; Polymethylmethacrylate

Indexed keywords

ATOMIC FORCE MICROSCOPY; ION BEAMS; LITHOGRAPHY; MICROSTRUCTURE; OPTICAL MICROSCOPY; POLYMETHYL METHACRYLATES; PROTONS; SURFACE ROUGHNESS;

PROTON LITHOGRAPHY, GALVANOFORMING AND PLASTIC MOULDING (PLIGA);

ION BOMBARDMENT;

EID: 0032040950     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00981-6     Document Type: Article

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