Microactuators and micromachines

Proceedings of the IEEE

Volumn 86, Issue 8, 1998, Pages 1721-1732

  Fujita, Hiroyuki ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

Microactuators; Microelectromechanical devices; Micromachining; Micromotors; Micropumps

Indexed keywords

ACTUATORS; MICROELECTRONICS; MICROMACHINING; MOTORS; PUMPS;

MICROELECTROMECHANICAL SYSTEMS; MICROMACHINES;

MICROELECTROMECHANICAL DEVICES;

EID: 0032142472     PISSN: 00189219     EISSN: None     Source Type: Journal    
DOI: 10.1109/5.704278     Document Type: Article

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