Modelling of stretching effects on the contacted diaphragm of pressure transducers by LIGA process

Sensors and Actuators, A: Physical

Volumn 69, Issue 2, 1998, Pages 192-198

  Choi, Bumkyoo ^a   Gyubong, Lee ^b  

^a Sogang University   (South Korea)

^b Korea Institute of Industrial Technology   (South Korea)

Author keywords

Diaphragm; LIGA; Mathematical programming; Pressure transducer; Stretching

Indexed keywords

DIAPHRAGMS; FINITE ELEMENT METHOD; MATHEMATICAL PROGRAMMING;

NONLINEAR CONTACT ANALYSIS; STRETCHING EFFECTS;

PRESSURE TRANSDUCERS;

EID: 0032136397     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00057-0     Document Type: Article

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