Preliminary results on the use of mirror for LIGA process

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3680, Issue II, 1999, Pages 917-923

  Megtert, Stephan ^a   Pantenburg, Franz Josef ^a   Achenbach, Sven ^a   Kupka, Roland ^a   Mohr, Juergen ^a   Roulliay, Marc ^a  

^a SYNCHROTRON SOLEIL   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; INTERFACES (MATERIALS); MICROSTRUCTURE; MIRRORS; OPTICAL FILTERS; PHOTONS; PHOTORESISTS; SUBSTRATES; X RAY LITHOGRAPHY;

DEEP X RAY LITHOGRAPHY; MICROSYSTEMS;

INTEGRATED OPTOELECTRONICS;

EID: 0032663402     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (10)