Characterization of gear pumps fabricated by LIGA

Microsystem Technologies

Volumn 4, Issue 4, 1998, Pages 163-167

  Deng, K ^a   Dewa, A S ^a   Ritter, D C ^a   Bonham, C ^a   Guckel, H ^b  

^a MEMStek Products   (United States)

^b University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0342997523     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050122     Document Type: Article

References (5)

1. Dewa AS; Deng K; Ritter DC: (1996) Design and implementation of LIGA fabricated, self-priming in-line gear pumps. Late News Digest, Solid State Sensor and Actuator Workshop, Hilton Head '96, (Hilton Head Island., SC, June 2-6): 29-30
2. Dewa AS; Deng K; Bonham C; Ritter DC; Guckel H; Masood-Ansari S: (1997) Development of LIGA-fabricated, self-priming, in-line gear pumps. Technical Digest, The 9th International Conference on Solid-State Sensors and Actuators, Transducers '97 (Chicago, IL, June 16-19)
3. RMB Miniature Bearings SA (1997) "Preliminary date sheet, smoovy 3 mm motor," Biel-Bienne, Switzerland
4. Guckel H; Christenson T; Skrobis K: (1992) Metal micromechanisms via deep x-ray lithography, electroplating and assembly. Proceedings of Actuator '92 (Bremen, Germany, June): 9-12
5. Guckel H; Mangat PS; Emmerich H; Massoud-Ansari S; Klein J; Earles T; Zook JD; Ohnstein T; Johnson ED; Siddons DP; Christenson TR: (1996) Advances in photoresist based processing tools for 3-dimensional precision and micro mechanics. Technical Digest, Solid-State Sensor and Actuator Workshop (Hilton Head Isl., SC, June 2-6): 60-63