Polymer materials for microsystem technologies

Microsystem Technologies

Volumn 5, Issue 1, 1998, Pages 44-48

  Ruprecht, R ^a   Hanemann, T ^a   Piotter, V ^a   Hausselt J ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0010350723     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050139     Document Type: Article

References (40)

1. Lorenz H; Despont M; Fahrni N; LaBianca N; Renaud P; Vettiger P (1996) A low-cost negative resist for MEMS. Suss-Report: Vol 10, pp. 1-3, Karl Süss KG GmbH & Co München, Germany.
2. Bacher W; Menz W; Mohr J (1995) The LIGA Technique and its Potential for Microsystems. IEEE Trans. Ind. Electr.: 42(5) 431.
3. Becker EW; Ehrfeld W; Hagmann P; Maner A; Münchmeyer D (1986) Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic molding (LIGA process). Microelectronic Engineering: 4, p. 35
4. Bley P; Mohr J (1994) The LIGA process - a microfabrication technology. FED Journal: 5 (Suppl 1), p. 34.
5. El-Kholi A; Bley P; Göttert J; Mohr, J (1993) Examination of the solubility and the molecular weight distribution of PMMA in view of an optimised resist system in deep etch X-ray lithography. Microelectronic Engineering: 21, pp. 271-274
6. Bacher W; Bade K; Leyendecker K; Menz W; Stark W; Thommes A (1996) Electrodeposition of microstructures. An important process in microsystem technology, In: N. Masuko, T. Osaka, Y. Ito, (Eds.), "Electrochemical Technology", Kodansha/Gordon & Breach, Tokyo, p. 159.
7. Schubert K; Bier W; Linder G; Seidel D (1990) Profiled diamonds for producing microstructures. Industrie Diamanten Rundschau: 24, p 235.
8. Lin L; Chiu Ch-J; Bacher W; Heckele M (1996) Microfabrication using silicon mold inserts and hot embossing. Proc. 7th Intern. Symp. Micro Machine and Human Science, Nagoya, Japan, p 66.
9. Fahrenberg J; Bier W; Maas D; Menz W; Ruprecht R; Schomburg WK (1994) Microvalve system fabricated by thermoplastic molding. Proc Micro Mechanics Europe 1994, Pisa, Italy, p 17.
10. Müller A; Göttert J; Mohr J; Rogner A (1996) Fabrication of stepped microoptical benches for fibre and free space application. Microsystem Technologies: 2, pp. 40-45
11. Harmening M; Bacher W; Bley P; El-Kholi A; Kalb H; Kowanz B; Menz W; Michel A; Mohr J (1992) Molding of three-dimensional microstructures by the LIGA process. Proc MEMS '92, Travemunde, Germany, Februar 92, IEEE Press New York p 202
12. Müller C; Mohr J (1993) Microspectrometer fabricated by the LIGA process. Interdisciplinary Science Reviews: 18 (3), p. 273.
13. Göttert J; Müller C; Mohr J (1992) Examples and potential applications of LIGA components in Microoptics. In: Ehrfeld et al W. (eds). Teubner Taschenbücher der Physik, Teubner, Stuttgart.
14. Nöker F; Keydel L (1992) Herstellen von Mikrostrukturkörpern aus Kunststoffen. Kunststoffe: 82, 798.
15. Ruprecht R; Bacher W; Haußelt JH; Piotter V (1995) Injection molding of LIGA and LIGA similar microstructures using filled and unfilled thermoplastics. SPIE Journal: 2639, p. 146.
16. Weber L; Ehrfeld W; Freimuth H; Lacher M; Lehr H; Pech B (1996) Micro molding-powerful tool for the large scale production of precise microstructures. Proc Symp. Micromachining and Microfabrication, Austin, Texas, p. 156.
17. Larsson O (1996) Polymeric microstructures and replication techniques. Proc Microstructure Workshop, Uppsala, Sweden, 26/27 March 1996, p. 5.1.
18. Pohlmann KC (1992). The Compact Disc Handbook. A-R Editions, Madison, WI.
19. Michaeli W; Rogalla A (1996) Spritzgießen von Mikrostrukturen. F&M Feinwerktechnik 104 (9) 641.
20. Piotter V; Hanemann T; Ruprecht R; Haußelt, J (1997) Injection molding and related techniques for fabrication of microstructures. Microsystem Technologies 3: 129-133
21. Heckele M; Bacher W (1997) Modular hot embossing equipment for MEMS. Micromachine Devices: 2 (2), 1
22. Kalb H; Bacher W; Harmening M; Ruprecht R (1995) Grundlegende Untersuchungen zur Fertigung gestufter Mikrostrukturen aus fluorierten Polymeren nach dem LIGA-Verfahren. Wissenschaftliche Berichte: FZKA 5576, Forschungszentrum Karlsruhe
23. Nöker F (1997) microParts, Dortmund, private communication
24. Wechsung R (1993) Mikrostrukturprodukte aus Metallen, Kunststoffen und Keramik. Sensor Report: 1, 41
25. Norajitra P; Müller K; Ruprecht R; Haußelt J (1996) Computer-Simulation zur Verbesserung der Wirtschaftlichkeit beim Spritzgießen von Kunststoffmikrostrukturen. Werkstoffwoche 1996.
26. Michel A; Harmening M; Ruprecht R; Bacher W (1993) Abformung von Mikrostrukturen auf prozessierten Wafern. KfK-Bericht 5171, Kernforschungszentrum Karlsruhe
27. Both A; Bacher W; Heckele M; Ruprecht R (1995) Herstellung beweglicher LIGA-Mikrostrukturen durch positionierte Abformung. Wissenschaftliche Berichte: FZKA 5671, Forschungszentrum Karlsruhe
28. Vollmer H; Ehrfeld W; Hagmann P (1987) Untersuchungen zur Herstellung von galvanisierbaren Mikrostrukturen mit extremer Strukturhöhe durch Abformung mit Kunststoff im Vakuum-Reaktionsgißverfahren. KfK Bericht 4267, Kernforschungszentrum Karlsruhe
29. Hanemann T; Piotter V; Ruprecht R; Haußelt J (1997) Molding of Polymeric Microstructures. Bayreuth Polymer Symposium, 1997.
30. Büstgens B; Bacher W; Bier W; Ehnes R; Maas D; Ruprecht R; Schomburg WK (1994) Micromembrane Pump manufactured by molding. Proceedings Actuator'94, Bremen, 15-17 Juni 1994, p. 86.
31. Goll C; Bacher W; Büstgens B; Maas D; Ruprecht R; Schomburg WK (1996) Electrostatically actuated polymer microvalve equipped with a movable membrane electrode. Proc MME'96, Barcelona, Spain, p. 231
32. Schomburg W; Ahrens R; Bacher W; Martin J; Engemann S; Krehl P (1997) Long-Term performance analysis of Thermo-Pneumatic Micropump Actuators. TRANSDUCERS 97, Chicago, 16-19 June 1997
33. Bauer H-D; Ehrfeld W; Gerner M; Paatzsch T; Picard A; Schift H; Weber L (1995) Microoptical Elements and Optical Interconnection Components Fabricated using the LIGA Technique. Proc. Int. Symp. on Microsystems, Intelligent Materials and Robots 1995, Sendai, J. Tani, ed. 33.
34. Mohr J; Göttert J; Müller A (1996) Microoptical devices based on free space optics. SPIE Symp Ser 2783, p. 6.
35. Köhler U; Guber AE; Bier W; Heckele M; Schaller Th. (1996) Fabrication of microlenses by combining silicon technology, mechanical micromachining and plastic molding. SPIE Proc Ser 2687, 18; Sensors and Actuators A 53, p. 361
36. Köhler U; Guber AE; Bier W; Heckele M; Schaller Th. (1996) Fabrication of microlenses by combining silicon technology, mechanical micromachining and plastic molding. SPIE Proc Ser 2687, 18; Sensors and Actuators A 53, p. 361
37. PMT Statusbericht des Projekts Mikrosystemtechnik im Forschungszentrum Karlsruhe: (1995) FZKA-Bericht 5670.
38. Krippner P; Mohr J; Müller C; van der Seel C (1996) Microspectrometer for the infrared range. Proc Microoptical Technologies for Measurement, Sensors, and Microsystems, Besanon, France p. 277.
39. Ritzhaupt-Kleissl H-J; Bauer U; Günther E; Laubersheimer J; Haußelt J (1996) Development of Ceramic Microstructures. Microsystem Technologies: 2, pp. 130-134.
40. Wöllmer H; Müller K; Ruprecht R; Haußelt J (1997) Gießen von Mikroteilen. DGM-Tagung, Braunschweig, 20 23 May 1997.