메뉴 건너뛰기
Sensors and Actuators, A: Physical
Volumn 67, Issue 1-3, 1998, Pages 159-165
Machining of three-dimensional microstructures in silicon by electro-discharge machining
Author keywords

Electro discharge machining; Microelectromechanical system (MEMS); Silicon micromachining
Indexed keywords

MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE;
EID: 0042997083     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01724-X     Document Type: Article
Times cited : (66)
References (11)
  • 2
    • 0022935691 scopus 로고
    • Current trends in non-conventional material removal processes
    • R. Snoeys, F. Staelens, W. Dekeyser, Current trends in non-conventional material removal processes, Annals CIRP 35 (1980) 467-480.
    • (1980) Annals CIRP , vol.35 , pp. 467-480
    • Snoeys, R.1    Staelens, F.2    Dekeyser, W.3
  • 3
    • 0031143966 scopus 로고    scopus 로고
    • Microstructuring of silicon by electro-discharge machining (EDM) - Part I: Theory
    • D. Reynaerts, P.-H. Heeren, H. Van Brussel, Microstructuring of silicon by electro-discharge machining (EDM) - part I: theory, Sensors and Actuators A 60 (1997) 212-218.
    • (1997) Sensors and Actuators A , vol.60 , pp. 212-218
    • Reynaerts, D.1    Heeren, P.-H.2    Van Brussel, H.3
  • 4
    • 0004537840 scopus 로고
    • Self-aligned machining and assembly of high aspect ratio microparts into silicon
    • Amsterdam, The Netherlands, Jan.
    • H.H. Langen, T. Masuzawa, M. Fujino, Self-aligned machining and assembly of high aspect ratio microparts into silicon, Proc. MEMS '95, Amsterdam, The Netherlands, Jan. 1995, pp. 187-191.
    • (1995) Proc. MEMS '95 , pp. 187-191
    • Langen, H.H.1    Masuzawa, T.2    Fujino, M.3
  • 5
    • 0002444286 scopus 로고
    • The present and future developments of EDM and ECM
    • Lausanne, Switzerland, 17-21 April
    • K. Kobayashi, The present and future developments of EDM and ECM, Proc. 11th Int. Symp. ElectroMachining, Lausanne, Switzerland, 17-21 April, 1995, pp. 29-47.
    • (1995) Proc. 11th Int. Symp. Electromachining , pp. 29-47
    • Kobayashi, K.1
  • 6
    • 0025888123 scopus 로고
    • Development of a pocket-size electro-discharge machine
    • T. Higuchi, K. Furutani, Y. Yamagata, K. Takeda, Development of a pocket-size electro-discharge machine, Annals CIRP 40 (1991) 203-205.
    • (1991) Annals CIRP , vol.40 , pp. 203-205
    • Higuchi, T.1    Furutani, K.2    Yamagata, Y.3    Takeda, K.4
  • 7
    • 0029210098 scopus 로고
    • Modular method for microparts machining and assembly with self-alignment
    • H.H. Langen, T. Masuzawa, M. Fujino, Modular method for microparts machining and assembly with self-alignment, Annals CIRP 44 (1995) 173-176.
    • (1995) Annals CIRP , vol.44 , pp. 173-176
    • Langen, H.H.1    Masuzawa, T.2    Fujino, M.3
  • 8
    • 0031167757 scopus 로고    scopus 로고
    • Microstructuring of silicon by electro-discharge machining (EDM) - Part II: Applications
    • D. Reynaerts, P.-H. 's Heeren, H. Van Brussel, Microstructuring of silicon by electro-discharge machining (EDM) - part II: applications, Sensors and Actuators A 61 (1997) 379-386.
    • (1997) Sensors and Actuators A , vol.61 , pp. 379-386
    • Reynaerts, D.1    'S Heeren, P.-H.2    Van Brussel, H.3
  • 9
    • 0026170683 scopus 로고
    • Surface micromachined mechanisms and micromotors
    • M. Mehregany, Y.C. Tai, Surface micromachined mechanisms and micromotors, J. Micromech Microeng. 1 (1991) 73-85.
    • (1991) J. Micromech Microeng. , vol.1 , pp. 73-85
    • Mehregany, M.1    Tai, Y.C.2

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.