Design of an electrostatically excited H-type resonant gyroscope suitable for fabrication using the LIGA process

Proceedings of the Institution of Mechanical Engineers, Part D: Journal of Automobile Engineering

Volumn 212, Issue 4, 1998, Pages 319-332

  Yao, L ^a   Chowanietz, E ^a   McCormick, M ^a   Lees, A ^a  

^a DE MONTFORT UNIVERSITY   (United Kingdom)

Author keywords

Automotive; Electrostatic excitation; Gyroscope; LIGA; Microsystem; Resonant

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SIMULATION; ELECTROFORMING; ELECTROSTATIC DEVICES; FINITE ELEMENT METHOD; SENSORS;

ELECTROSTATIC-STRUCTURAL COUPLED FIELD PROBLEM; ELECTROSTATICALLY EXCITED H-TYPE RESONANT GYROSCOPES;

GYROSCOPES;

EID: 0032314146     PISSN: 09544070     EISSN: None     Source Type: Journal    
DOI: 10.1243/0954407981525993     Document Type: Article

References (8)

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