Fabrication of nonplanar spin-on glass microstructures

Journal of Microelectromechanical Systems

Volumn 8, Issue 2, 1999, Pages 146-151

  Liu, Robin H ^a   Vasile, Michael J ^b   Beebe, David J ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b LOUISIANA TECH UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; CURING; DRYING; ELECTROFORMING; ELECTROPLATING; FABRICATION; LITHOGRAPHY; MOLDS; NICKEL;

GLASS MICROSTRUCTURES; NICKEL MOLDS; SPIN ON GLASS;

GLASS;

EID: 0033149013     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.767110     Document Type: Article

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