Micro electro mechanical systems from research to applications

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 12 B, 1998, Pages 7047-7051

  Lang, Walter ^a   Sandmaier, Hermann ^a  

^a Hahn Schickard Gesellschaft (HSG)   (Germany)

Author keywords

Application; MEMS; Micro electro mechanical systems; Microsystem; Sensor

Indexed keywords

EID: 4243487569     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.7047     Document Type: Article

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