Extreme ultraviolet lithography with table top lasers

Progress in Quantum Electronics

Volumn 34, Issue 4, 2010, Pages 173-190

  Marconi, M C ^a   Wachulak, P W ^b  

^a Veterinary Dentistry and Oral Surgery   (United States)

^b MILITARY UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

EUV lasers; Interferometric lithography; Nanopatterning

Indexed keywords

EXTREME ULTRAVIOLET LITHOGRAPHY; INTERFEROMETRY;

COHERENT ILLUMINATION; DEGREE OF COHERENCE; EUV LASERS; EXTREME ULTRAVIOLET LASERS; HIGH BRIGHTNESS; INTERFEROMETRIC LITHOGRAPHY; LABORATORY ENVIRONMENT; NANOPATTERNING;

ULTRAVIOLET LASERS;

EID: 77955581722     PISSN: 00796727     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.pquantelec.2010.03.001     Document Type: Review

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