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Volumn 16, Issue 12, 2008, Pages 9106-9111

4X reduction extreme ultraviolet interferometric lithography

Author keywords

[No Author keywords available]

Indexed keywords

EXTREME ULTRAVIOLET LITHOGRAPHY; LITHOGRAPHY; MASKS; PHOTORESISTS; SYNCHROTRON RADIATION;

EID: 45249085424     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.16.009106     Document Type: Article
Times cited : (26)

References (16)
  • 1
    • 33845382940 scopus 로고    scopus 로고
    • Sober view on extreme ultraviolet lithography
    • and the references there in
    • Burn J. Lin, "Sober view on extreme ultraviolet lithography," J. Microlith., Microfab., Microsyst. 5, 033005 (2006), and the references there in.
    • (2006) J. Microlith., Microfab., Microsyst , vol.5 , pp. 033005
    • Lin, B.J.1
  • 2
    • 0000736473 scopus 로고
    • Achromatic holographic lithography in the deep ultraviolet
    • E. H. Anderson, K. Komatsu, and H. I. Smith, "Achromatic holographic lithography in the deep ultraviolet," J. Vac. Sci. Technol. B 6, 216 (1988)
    • (1988) J. Vac. Sci. Technol. B , vol.6 , pp. 216
    • Anderson, E.H.1    Komatsu, K.2    Smith, H.I.3
  • 4
    • 0000219098 scopus 로고
    • Patterning a 50-nm Period Grating using Soft Xray Spatial Frequency Multiplication
    • M. Wei, D.T. Attwood, T.K. Gustafson, and E.H. Anderson, "Patterning a 50-nm Period Grating using Soft Xray Spatial Frequency Multiplication", J. Vac. Sci. and Tech., 12/6, 3648-3652, (1994).
    • (1994) J. Vac. Sci. and Tech , vol.12 , Issue.6 , pp. 3648-3652
    • Wei, M.1    Attwood, D.T.2    Gustafson, T.K.3    Anderson, E.H.4
  • 12
    • 0347532062 scopus 로고
    • Macmillan, New York, 7th Ed, Chap. 8, p
    • M. Born and E. Wolf, "Principles of Optics," Macmillan, New York, (1964), 7th Ed., Chap. 8, p. 412.
    • (1964) Principles of Optics , pp. 412
    • Born, M.1    Wolf, E.2
  • 13
    • 0001414158 scopus 로고    scopus 로고
    • Measurement of the efficiency of gold transmission gratings in the 100 to 5000 eV photon energy range
    • L. E. Ruggles, M. E. Cuneo, J. L. Porter, D. F. Wenger, and W. W. Simpson, "Measurement of the efficiency of gold transmission gratings in the 100 to 5000 eV photon energy range.," Rev. Sci. Instrum. 72, 1218 (2001).
    • (2001) Rev. Sci. Instrum , vol.72 , pp. 1218
    • Ruggles, L.E.1    Cuneo, M.E.2    Porter, J.L.3    Wenger, D.F.4    Simpson, W.W.5
  • 14
    • 45249095143 scopus 로고    scopus 로고
    • Progress in extreme ultraviolet interferometric lithography at the University of Wisconsin
    • Artak Isoyan, Yang-Chun Cheng, Fan Jiang, John Wallace, Mikhail Efremov, Paul Nealey, and Franco Cerrina, 'Progress in extreme ultraviolet interferometric lithography at the University of Wisconsin," Proc. SPIE 6921, 6921R (2008).
    • (2008) Proc. SPIE , vol.6921
    • Isoyan, A.1    Cheng, Y.-C.2    Jiang, F.3    Wallace, J.4    Efremov, M.5    Nealey, P.6    Cerrina, F.7


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.