Extreme Ultraviolet Holographic Lithography with a table-top laser

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7271, Issue , 2009, Pages

  Isoyan, A ^a   Jiang, F ^a   Cheng, Y C ^a   Wachulak, P ^b   Urbanski, L ^b   Rocca, J ^b   Menoni, C ^b   Marconi, M ^b   Cerrina, F ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

^b Veterinary Dentistry and Oral Surgery   (United States)

Author keywords

Euv holographic lithography; Euv laser; Imaging

Indexed keywords

ATOMIC FORCE MICROSCOPES; COMPUTER GENERATED HOLOGRAMS; EUV HOLOGRAPHIC LITHOGRAPHY; EUV LASER; EUV SOURCE; EXTREME ULTRAVIOLET; EXTREME ULTRAVIOLET LASERS; HIGH RESOLUTION; IMAGING; NUMERICAL PREDICTIONS; PIXEL SIZE; RECONSTRUCTED IMAGE; TABLE-TOP; TABLETOP LASERS; TEST PATTERN;

COMPUTER GENERATED HOLOGRAPHY; ELECTRON HOLOGRAPHY; EXTREME ULTRAVIOLET LITHOGRAPHY; LASER PULSES; LASERS; NANOLITHOGRAPHY; RESTORATION;

ULTRAVIOLET DEVICES;

EID: 67249120572     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.814678     Document Type: Conference Paper

References (16)

1. M. L. Schattenburg, C. Chen, P. N. Everett, J. Ferrera, P. Konkola, and H.I. Smith, J. Vac. Sci. Technol. B 17, 2692 (1999).
2. M. Wei, D.T. Attwood, T.K. Gustafson, and E.H. Anderson, J. Vac. Sci. and Tech., 12/6, 3648-3652, (1994).
3. H. H. Solak, D. He, W. Li, S. Singh-Gasson, F. Cerrina, B. H. Sohn, X.M. Yang, and P. Nealey, Appl. Phys. Lett. 75, 2328 (1999).
4. A. Isoyan, A. Wüest, J. Wallace, F. Jiang, and F. Cerrina, Opt. Express 16, 9106-9111 (2008).
5. Sang Ouk Kim, Harun H. Solak, Mark P. Stoykovich, Nicola J. Ferrier, Juan J. de Pablo, Paul F. Nealey, Nature, Vol.424, 411-414 (2003).
6. Y.-C. Cheng, A. Isoyan, J. Wallace, M. Khan, and F. Cerrina, Appl. Phys. Lett. 90, 023116 (2007).
7. J.J. Rocca, F.G. Tomasel, M.C. Marconi, V.N. Shlyaptsev, J.L.A. Chilla, B.T. Szapiro and G. Giudice. Physics of Plasmas, 2, 2547-2554, (1995).
8. A. G. Michette, Optical Systems for Soft X rays, New York, (1986).
9. Ming Sun Fu, Oscar C. Au, Signal Processing: Image Communication, Volume 16, Issue 10, 909-930 (2001).
10. A. Isoyan, Y.-C. Cheng, F. Jiang, J. Wallace, F. Cerrina, J. Vac. Sci. Technol. B Volume25, Issue 6, pp. 2145-2150 (2007).
11. Guo-zhen Yang, Bi-zhen Dong, Ben-yuan Gu, Jie-yao Zhuang, Okan K. Ersoy, Applied Optics, Vol.33, Issue 2, pp. 209-218 (1994).
12. A. Isoyan, F. Jiang, Y.-C. Cheng et al, Proc. SPIE 6921, 69212R (2008).
13. Center for Nanoscale Materials, www.cnm.anl.gov.
14. Y. Liu, M. Seminario, F.G. Tomasel, C. Chang, J.J. Rocca, D. Attwood, Physical Review A, 3,6303 (2001).
15. Y. Wang, M.A. Larotonda, B.M. Luther, D. Alessi, M. Berrill, V.N. Shlyaptsev, J.J. Rocca, Physical Review A, 5, 72 (2005).
16. Y. Wang, E. Granados, F. Pedaci, D. Alessi, B. Luther, M. Berrill, J.J. Rocca, Nature Photonics, 2, 2, 94-98 (2008).