Patterning of nano-scale arrays by table-top extreme ultraviolet laser interferometric lithography

Optics Express

Volumn 15, Issue 6, 2007, Pages 3465-3469

  Wachulak, P W ^a   Capeluto, M G ^b   Marconi, M C ^a   Menoni, C S ^a   Rocca, J J ^a  

^a Department of Environmental and Radiological Health Sciences   (United States)

^b UNIVERSIDAD DE BUENOS AIRES   (Argentina)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAY PROCESSING; INTERFEROMETERS; LITHOGRAPHY;

NANOSCALE PATTERNS; TABLETOP SET UP;

NANOSTRUCTURED MATERIALS;

EID: 33947387933     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.15.003465     Document Type: Article

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