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Volumn 37, Issue 3, 1998, Pages 473-478

Effects of phase shifts on four-beam interference patterns

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EID: 0000165653     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.37.000473     Document Type: Article
Times cited : (56)

References (8)
  • 2
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    • Field emitter array mask patterning using interference lithography
    • J. P. Spallas, A. M. Hawryluk, and D. R. Kania, “Field emitter array mask patterning using interference lithography, ” J. Vac. Sci. Technol. B 13, 1973-1978 (1995).
    • (1995) J. Vac. Sci. Technol , vol.B 13 , pp. 1973-1978
    • Spallas, J.P.1    Hawryluk, A.M.2    Kania, D.R.3
  • 3
    • 0000944804 scopus 로고    scopus 로고
    • Inter-ferometric lithography of sub-micrometer sparse hole arrays for field-emission display applications
    • X. Chen, S. H. Zaidi, S. R. J. Brueck, and D. J. Devine, “Inter-ferometric lithography of sub-micrometer sparse hole arrays for field-emission display applications, ” J. Vac. Sci. Technol. B 14, 3339-3349 (1996).
    • (1996) J. Vac. Sci. Technol , vol.B 14 , pp. 3339-3349
    • Chen, X.1    Zaidi, S.H.2    Brueck, S.R.J.3    Devine, D.J.4
  • 4
    • 0031142346 scopus 로고    scopus 로고
    • The use of interference lithography to pattern arrays of submicron resist structures for field emission flat panel displays
    • A. Fernandez, H. T. Nguyen, J. A. Britten, R. D. Boyd, D. R. Kania, A. M. Hawryluk, and M. D. Perry, “The use of interference lithography to pattern arrays of submicron resist structures for field emission flat panel displays, ” J. Vac. Sci. Technol. B 15, 729-735 (1997).
    • (1997) J. Vac. Sci. Technol , vol.B 15 , pp. 729-735
    • Fernandez, A.1    Nguyen, H.T.2    Britten, J.A.3    Boyd, R.D.4    Kania, D.R.5    Hawryluk, A.M.6    Perry, M.D.7
  • 5
    • 0000804952 scopus 로고
    • Multiple-exposure interfero-metric lithography
    • S. H. Zaidi and S. R. J. Brueck, “Multiple-exposure interfero-metric lithography, ” J. Vac. Sci. Technol. B 11, 658-666 (1993).
    • (1993) J. Vac. Sci. Technol , vol.B 11 , pp. 658-666
    • Zaidi, S.H.1    Brueck, S.R.J.2
  • 6
    • 0030247518 scopus 로고    scopus 로고
    • Magnetic force microscopy of single-domain cobalt dots patterned using interference lithography
    • A. Fernandez, P. J. Bedrossian, S. L. Baker, S. P. Vernon, and D. R. Kania, “Magnetic force microscopy of single-domain cobalt dots patterned using interference lithography, ” IEEE Trans. Magn. 32, 4472-4474 (1996).
    • (1996) IEEE Trans. Magn. , vol.32 , pp. 4472-4474
    • Fernandez, A.1    Bedrossian, P.J.2    Baker, S.L.3    Vernon, S.P.4    Kania, D.R.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.