Fabrication of metallic micropatterns using table top extreme ultraviolet laser interferometric lithography

Plasma Sources Science and Technology

Volumn 17, Issue 2, 2008, Pages

  Ottaviano, L ^a   Bussolotti, F ^a   Piperno, S ^a   Rinaldi, M ^a   Santucci, S ^a   Flora, F ^b   Mezi, L ^b   Dunne, P ^c   Kaiser, J ^d   Reale, A ^a   Ritucci, A ^a   Zuppella, P ^a  

^a UNIVERSITY OF L'AQUILA   (Italy)

^b ENEA   (Italy)

^c UNIVERSITY COLLEGE DUBLIN   (Ireland)

^d BRNO UNIVERSITY OF TECHNOLOGY   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; LASER INTERFEROMETRY; LITHOGRAPHY; PERIODIC STRUCTURES; PHOTORESISTS; POLYMETHYL METHACRYLATES; ULTRAVIOLET RADIATION;

LASER INTERFEROMETRIC LITHOGRAPHY; METALLIC MICROPATTERNS; PATTERNING ENCODING; SPACED NICKEL STRIPS;

NANOTECHNOLOGY;

EID: 43149109467     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/17/2/024019     Document Type: Article

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