Reflection mode imaging with nanoscale resolution using a compact extreme ultraviolet laser

Optics Express

Volumn 13, Issue 11, 2005, Pages 3983-3988

  Brizuela, F ^a   Vaschenko, G ^a   Brewer, C ^a   Grisham, M ^a   Menoni, C S ^a   Marconi, M C ^a   Rocca, J J ^a   Chao, W ^b   Liddle, J A ^b   Andersen, E H ^b   Attwood, D T ^b   Vinogradov, A V ^c   Artioukov, I A ^c   Pershyn, Y P ^d   Kondratenko, V V ^d  

^a Department of Civil and Environmental Engineering   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c LEBEDEV PHYSICAL INSTITUTE   (Russian Federation)

^d NATIONAL TECHNICAL UNIVERSITY   (Ukraine)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS; LASERS; LIGHT REFLECTION; MICROELECTRONICS; NANOTECHNOLOGY; OPTICAL MICROSCOPY; SYNCHROTRON RADIATION; ULTRAVIOLET RADIATION; X RAYS;

CAPILLARY DISCHARGE LASERS; EXTREME ULTRAVIOLET LASERS; NANOSCALE RESOLUTION; REFLECTION MODE IMAGING;

IMAGING TECHNIQUES;

EID: 21244461155     PISSN: 10944087     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OPEX.13.003983     Document Type: Article

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