Nanometer-scale machining by laser ablation with a focused extreme ultraviolet laser beam

2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum Electronics and Laser Science Conference, CLEO/QELS 2009

Volumn , Issue , 2009, Pages

  Bravo, H ^a   Szapiro, B T ^a,b   Wachulak, P W ^a   Marconi, M C ^a   Chao, W ^c   Anderson, E H ^c   Attwood, D T ^c   Menoni, C S ^a   Rocca, J J ^a  

^a Veterinary Dentistry and Oral Surgery   (United States)

^b UNIVERSITY OF THE SOUTH   (United States)

^c LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPILLARY DISCHARGE LASERS; EXTREME ULTRAVIOLET; EXTREME ULTRAVIOLET LASERS; FRESNEL ZONE PLATE LENS; NANO-METER-SCALE; TABLE-TOP;

ELECTRON OPTICS; LASER ABLATION; QUANTUM ELECTRONICS; ULTRAVIOLET DEVICES;

LASERS;

EID: 71049182633     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. S. Heinbuch, M. Grisham, D. Martz, and J.J. Rocca, "Demonstration of a desk-top size high repetition rate soft x-ray laser," Optics Express 13, 4050, (2005).
2. G. Vaschenko, et al. "Nanometer scale ablation with a table-top soft x-ray laser," Optics Letters, 31, 3615, (2006).
3. B.R. Benware, C.D. Macchietto, C.H. Moreno, and J.J. Rocca, "Demonstration of a High Average Power Tabletop Soft X-Ray Laser," Physical Review Letters 81, 5804, (1998).
4. Anderson, E.H., Specialized Electron Beam Nanolithography for EUV and X-Ray Diffractive Optics. IEEE Journal of Quantum Electronics, 2006. 42(1): p. 27-35.
5. L. Juha et al., Ablation of organic polymers by 46.9-nm-laser radiation," Appl. Phys. Lett. 86, 034109 (2005).