Patterning of circular structure arrays with interference lithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 6, 2003, Pages 2883-2887

  Solak, Harun H ^a   David, Christian ^a  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; ELECTRON BEAMS; LASER BEAMS; LIGHT INTERFERENCE; LIGHT REFLECTION; OPTICAL COATINGS; OPTICAL DESIGN; OPTICAL FILTERS; REFRACTIVE INDEX; SUBSTRATES;

INTERFERENCE LITHOGRAPHY (IL); PHOTONIC CRYSTALS; REFRACTIVE OPTICS;

PHOTOLITHOGRAPHY;

EID: 0942300043     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1622943     Document Type: Conference Paper

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