Water immersion optical lithography at 193 nm

Journal of Microlithography, Microfabrication and Microsystems

Volumn 3, Issue 1, 2004, Pages 44-51

  Smith, Bruce W ^a   Bourov, Anatoly ^a   Kang, Hoyoung ^a   Cropanese, Frank ^a   Fan, Yongfa ^a   Lafferty, Neal ^a   Zavyalova, Lena ^a  

^a ROCHESTER INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Excimer lasers; Immersion; Optical extension; Optical lithography

Indexed keywords

FLUID COMPOSITION; HALF-PITCH RESOLUTION; OPTICAL EXTENSION; WATER IMMERSION;

ABERRATIONS; ABSORPTION; BIREFRINGENCE; EXCIMER LASERS; IMAGING TECHNIQUES; OPTICAL RESOLVING POWER; REFRACTIVE INDEX; SCANNING; SOLUBILITY; WAVE PROPAGATION;

PHOTOLITHOGRAPHY;

EID: 2542482683     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1637594     Document Type: Article

References (12)

1. E. Abbe (1878).
2. B. J. Lin, "The k3 coefficient in nonparaxial λ/NA scaling equations for resolution, depth of focus, and immersion lithography," J. Microlithogr., Microfabr., Microsyst. 1(1), 7-12 (2002).
3. The International Association for the Properdes of Water and Steam, "Release on the refractive index of ordinary water substance as a function of wavelength, temperature, and pressure," Erlangen, Germany (1997).
4. A. Takanashi, "Pattern forming apparatus," US Patent No. 4,480,910 (1984).
5. W. Taberelli, "Apparatus for the lithographic manufacture of integrated circuit elements," US Patent No. 4,509,852 (1985).
6. P. E. Dyer, R. J. Farley, and R. Giedl, "Analysis and application of a 0/1 order talbot interferometer for 193 nm laser grating formation," Opt. Commun. 129, 98 (1996).
7. Prolith/7 Vector Model, KLA-Tencor (2003).
8. E. P. Zege, A. P. Ivanov, and I. L. Katsev, Image Transfer Through a Scattering Medium, pp. 186-235, Springer-Verlag, New York (1991).
9. C. F. Bohren and D. R. Hoffman, Absorption and Scattering of Light by Small Panicles, pp. 83-129, Wiley, New York (1983).
10. ProMAX/2D, KLA-Tencor based on K. S. Yee, "Numerical solution of initial boundary value problems involving Maxwell's equations in Isotropic media," IEEE Trans. Antennas Propag. AP-14, 302 (1996).
11. J. W. G. Tyrrell and P. Attard, "Atomic force microscope images of nanobubbles on a hydrophobic surface and corresponding force-separation data," Langmuir 18, 160-167 (2002).
12. P. Attard, M. P. Moody, and J. W. G. Tyrrell, "Nanobubbles: The big picture," Physica A 314, 696-705 (2002).