Report on the 47th IUVSTAworkshop 'angle-resolved XPS: The current status and future prospects for angle-resolved XPS of nano and subnano films'

Surface and Interface Analysis

Volumn 41, Issue 11, 2009, Pages 840-857

  Herrera Gomez, A ^a,b   Grant, J T ^c   Cumpson, P J ^d,s   Jenko, M ^e   Aguirre Tostado, F S ^b   Brundle, C R ^f   Conard, T ^g   Conti, G ^h   Fadley, C S ⁱ   Fulghum, J ^j   Kobayashi, K ^k   Kover L ^l   Nohira, H ^m   Opila, R L ⁿ   Oswald, S ^o   Paynter, R W ^p   Wallace, R M ^b   Werner, W S M ^q   Wolstenholme, J ^r  

^a DEPARTAMENTO DE FÍSICA   (Mexico)

^b The University of Texas at Dallas   (United States)

^c UNIVERSITY OF DAYTON   (United States)

^d NATIONAL PHYSICAL LABORATORY   (United Kingdom)

^e INSTITUTE OF METALS AND TECHNOLOGY   (Slovenia)

^f C R Brundle and Associates   (United States)

^g IMEC   (Belgium)

^h APPLIED MATERIALS INC   (United States)

ⁱ LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^j University of New Mexico   (United States)

^k Institute of Nuclear Research of the Hungarian Academy of Sciences ^*  (Japan)

^l INSTITUTE OF NUCLEAR RESEARCH ATOMKI   (Hungary)

^m TOKYO CITY UNIVERSITY   (Japan)

ⁿ UNIVERSITY OF DELAWARE   (United States)

^o IFW DRESDEN   (Germany)

^p INRS EMT   (Canada)

^q Institut für Allgemeine Physik   (Austria)

^r Thermo Fisher Scientific   (United States)

^s NEWCASTLE UNIVERSITY   (United Kingdom)

more..

Author keywords

Angle resolved X ray photoelectron spectroscopy; ARXPS; Hard X ray photoemission; IUVSTA workshop; Maximum entropy; Near surface analysis; Non destructive depth profiling; Stratification; Surface analysis; X ray photoelectron spectroscopy; XPS

Indexed keywords

ANGLE-RESOLVED X-RAY PHOTOELECTRON SPECTROSCOPY; ARXPS; HARD X-RAY PHOTOEMISSION; IUVSTA WORKSHOP; MAXIMUM ENTROPY; NEAR-SURFACE ANALYSIS; NON-DESTRUCTIVE DEPTH PROFILING; STRATIFICATION; XPS;

DEPTH PROFILING; EMISSION SPECTROSCOPY; FILMS; MOLECULAR ORBITALS; PHOTOELECTRONS; PHOTOEMISSION; PHOTOIONIZATION; PHOTONS; SINGLE CRYSTAL SURFACES; SPECTRUM ANALYSIS; SURFACE ANALYSIS; TECHNICAL PRESENTATIONS; VACUUM APPLICATIONS; X RAY ANALYSIS; X RAYS;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 70350335590     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.3105     Document Type: Conference Paper

References (110)

1. C. S. Fadley, Prog. Surf. Sci. 1984, 16, 275.
2. E. Garfunkel, T. Gustafsson, P. Lysaght, S. Stemmer, R. Wallace. Future Fab Intl. 2006, 21, 126.
3. Z. H. Lu, J. P. McCaffrey, B. Brar, G. D. Wilk, R. M. Wallace, L. C. Feldman. Appl. Phys. Lett. 1997, 71, 2764.
4. J. R. Shallenberger, D. A. Cole, S. W. Novak, J. Vac. Sci. Technol. 1999, A17, 1086.
5. J. P. Chang, M. L. Green, V. M. Donnelly, R. L. Opila, J. Eng Jr, J. Sapjeta, P. J. Silverman, B. Weir, H. C. Lu, T. Gustafsson, E. Garfunkel, J. Appl. Phys. 2000, 87, 4449.
6. M. L. Green, E. P. Gusev, R. Degraeve, E. L. Garfunkel, J. Appl. Phys. 2001, 90, 2057.
7. T. Hattori, H. Nohira, S. Shinagawa, M. Hori, M. Kase, T. Maruizumi, Microelectron. Reliabil. 2007, 47, 20.
8. C. J. Powell, W. S. M. Werner, W. Smekal, Appl. Phys. Lett. 2006, 89, 172101.
9. C. J. Powell, W. S. M. Werner, W. Smekal, Appl. Phys. Lett. 2006, 89, 252116.
10. R. M. Wallace, G. D. Wilk, Crit. Rev. Sol. State Matls. Sci. 2003, 28, 231.
11. C. J. Powell, W. Smekal, W. S. M. Werner, Characterization and Metrology for ULSI, CP 788, 2005, 107.
12. P. Mack, R. G. White, J. Wolstenholme, T. Conard. Appl. Surf. Sci. 2006, 252, 8270.
13. J. J. Chambers, B. W. Busch, W. H. Schulte, T. Gustafsson, E. Garfunkel, S. Wang, D. M. Maher, T. M. Klein, G. N. Parsons, Appl. Surf. Sci. 2001, 181, 78.
14. S. Oswald, F. Oswald, J. Appl. Phys. 2006, 100, 104504.
15. S. Oswald, M. Zier, R. Reiche, K. Wetzig, Surf. Interface Anal. 2006, 38, 590.
16. S. Oswald, Surf. Sci. 2008, 602, 291.
17. F. S. Aguirre-Tostado, D. Layton, A. Herrera-Gomez, R. M. Wallace, J. Zhu, G. Larrieu, E. Maldonado, W. P. Kirk, M. Tao, J. Appl. Phys. 2007, 102, 084901.
18. F. S. Aguirre-Tostado, M. Milojevic, C. L. Hinkle, E. M. Vogel, R. M. Wallace, S. McDonnell, G. J. Hughes, Appl. Phys. Lett. 2008, 92, 171906.
19. S. Oktyabrsky, V. Tokranov, M. Yakimov, R. Moore, S. Koveshnikov, W. Tsai, F. Zhu, J. C. Lee, Mat. Sci. Eng. B 2006, 135, 272.
20. C. R. Brundle, H. Hopster, J. D. Swalen, J. Chem. Phys. 1979, 70, 5190.
21. P. E. Laibinis, J. J. Hickman, M. S. Wrighton, G. M. Whitesides, Science 1989, 245, 845.
22. J. P. Folkers, C. B. Gorman, P. E. Laibinis, S. Buchholz, G. M. Whitesides, R. G. Nuzzo, Langmuir 1995, 11, 813.
23. A. Jakubowicz, H. Jia, R. M. Wallace, B. E. Gnade, Langmuir 2005, 21, 950.
24. M. Sato, N. Tsukamoto, T. Shiratori, T. Furusawa, N. Suzuki, S. Tougaard, Surf. Interface Anal. 2006, 38, 604.
25. E. Ito, M. Hara, Jpn. J. Appl. Phys. 2008, 47(2), 1393.
26. B. S. Kim, H. Y. Jeong, B. K. Kim, Colloid Surface A 2005, 268, 60.
27. K. Artyushkova, J. E. Fulghum, J. Electron. Spectros. Relat. Phenom. 2005, 149, 51.
28. R. W. Paynter, D. Roy-Guay, G. Parent, M. Ménard, Surf. Interface Anal. 2007, 39, 445.
29. W. S. M. Werner, Surf. Interface Anal. 2001, 31, 141.
30. A. Jablonski, F. Salvat, C. J. Powell, Phys. Chem. Ref. Data 2004, 33, 4090.
31. W. S. M. Werner, Phys. Rev. B 2006, 74, 075421.
32. A. Cohen-Simonsen, F. Yubero, S. Tougaard, Phys. Rev. B 1997, 56, 1612.
33. W. S. M. Werner, Surf. Sci. 2005, 588, 26.
34. W. S. M. Werner, Surf. Sci. 2006, 600, 250.
35. W. S. M. Werner, Appl. Phys. Lett. 2006, 89, 213106.
36. W. S. M. Werner, G. C. Smith, A. K. Livesey, Surf. Interface Anal. 1992, 21, 38.
37. K. Olejnik, J. Zemek, W. S. M. Werner, Surf. Sci. 2005, 595, 212.
38. W. Smekal, W. S. M. Werner, C. J. Powell, Surf. Interface Anal 2005, 37, 1059.
39. M. B. Trzhaskovskaya, V. I. Nefedov, V. G. Yarzhemsky, At. Data Nucl. Data Tables 2001, 77, 97.
40. T. Fujikawa, R. Suzuki, H. Arai, H. Shinotsuka, L. Kover, J. Electron Spectrosc. Relat. Phenom. 2007, 159, 14.
41. M. P. Seah, I. S. Gilmore, Phys. Rev. 2006, B73, 174133.
42. Erratum: Phys. Rev. 2007; B75, 149901
43. M. B. Trzhaskovskaya, V. I. Nefedov, V. G. Yarzhemsky, R. Szargan, J. Electron Spectrosc. Relat. Phenom. 2003, 133, 65.
44. V. G. Yarzhemsky, V. I. Nefedov, M. B. Trzhaskovskaya, I. M. Band, R. Szargan, J. Electron Spectrosc. Relat. Phenom. 2002, 123, 1.
45. L. Kövér, Z. Berényi, I. Cserny, L. Lugosi, W. Drube, T. Mukoyama, V. R. R. Medicherla, Phys. Rev. 2006, B73, 195101.
46. L. Kövér, M. Novák, S. Egri, I. Cserny, Z. Berényi, J. Tóth, D. Varga, W. Drube, F. Yubero, S. Tougaard, W. S. M. Werner, Surf. Interface Anal. 2006, 38, 569.
47. F. Yubero, L. Kövér, W. Drube, Th. Eickhoff, S. Tougaard, Surf. Sci. 2005, 592, 1.
48. M. Novák, S. Egri, L. Kövér, I. Cserny, W. Drube, W. S. M. Werner, Surf. Sci. 2007, 601, 2344.
49. V. I. Nefedov, V. G. Yarzhemsky, R. Hesse, P. Streubel, R. Szargan, J. Electron Spectrosc. Relat. Phenom. 2002, 125, 153.
50. T. S. Lassen, S. Tougaard, A. Jablonski, Surf. Sci. 2001, 481, 150.
51. W. S. M. Werner, W. Smekal, C. Tomastik, H. Störi, Surf. Sci. 2001, 486, L461.
52. Y. F. Chen, Surf. Sci. 2002, 519, 115.
53. C. M. Kwei, Y. C. Li, C. J. Tung, Surf. Sci. 2006, 600, 3690.
54. K. Salma, Z. J. Ding, H. M. Li, Z. M. Zhang, Surf. Sci. 2006, 600, 1526.
55. C. S. Fadley, R. J. Baird, W. Siekhaus, T. Novakov, S. A. L. Bergstrom, J. Electron Spectrosc. Relat. Phenom. 1974, 4, 93.
56. J. M. Hill, D. G. Royce, C. S. Fadley, L. F. Wagner, F. J. Grunthaner, Chem. Phys. Lett. 1976, 44, 225.
57. P. J. Cumpson, P. C. Zalm, Surf. Interface Anal. 2000, 29, 403.
58. W. H. Gries, Mikrochim. Acta 1992, 107, 117.
59. M. P. Seah, J. H. Qiu, P. J. Cumpson, J. E. Castle, Surf. Interface Anal. 1994, 21, 336.
60. P. J. Cumpson, J. Electron Spectrosc. Relat. Phenom. 1995, 73, 25.
61. B. J. Tyler, D. G. Castner, B. D. Ratner, Surf. Interface Anal. 1989, 14, 443.
62. S. E. Borodyansky, Yu. G. Abashkin, Surf. Sci. 1991, 251/252, 325.
63. J. P. Chang, M. L. Green, V. M. Donnelly, R. L. Opila, J. Eng, J. Sapjeta, P. J. Silverman, B. Weir, H. C. Lu, T. Gustafsson, E. Garfunkel, Jr, J. Appl. Phys. 2000, 87, 4449.
64. J. Eng, I. A. Hubner, J. Barriocanal, R. L. Opila, D. J. Doren, J. Appl. Phys. 2004, 95, 1963.
65. A. K. Livesey, G. C. Smith, J. Electron Spectrosc. Relat. Phenom. 1994, 67, 439.
66. A. Herrera-Gómez, A. Hegedus, P. L. Meissner, Appl. Phys. Lett. 2002, 81, 1014.
67. A. Herrera-Gomez, F. S. Aguirre-Tostado, M. A. Quevedo-Lopez, P. D. Kirsch, M. J. Kim, R. M. Wallace, J. Appl. Phys. 2008, 104, 103520.
68. A. Herrera-Gomez. "Self consistent ARXPS analysis for multilayer conformal films with abrupt interfaces." Internal Report. CINVESTAV-Unidad Queretaro. A copy could be downloaded from http://www.qro.cinvestav.mx/ ∼aanalyzer/arxpsAnalysisSharpIntefaces.pdf.
69. A. Herrera-Gomez. "Simultaneous data fitting in ARXPS." Internal Report. CINVESTAV-Unidad Queretaro. A copy could be downloaded from http://www.qro.cinvestav.mx/∼aanalyzer/SimultaneousFitting.pdf.
70. M.-C. Tremblay, R. W. Paynter, Surf. Interface Anal. 2003, 35, 502.
71. R. W. Paynter, D. Roy-Guay, Plasma Processes Polym. 2007, 4, 406.
72. R. W. Paynter, D. Roy-Guay, G. Parent, M. Ménard, Surf. Interface Anal. 2007, 39, 445.
73. R. W. Paynter, M. Ménard, J. Electron Spectrosc. Relat. Phenom. 2006, 151, 14.
74. L. Kövér, S. Tougaard, J. Tóth, L. Daróczi, I. Szabó, G. Langer, M. Menyhárd, Surf. Interface Anal. 2001, 31, 271.
75. L. Kövér, S. Tougaard, W. S. M. Werner, I. Cserny, Surf. Interface Anal. 2002, 33, 681.
76. B. S. Semak, C. Van Der Marel, S. Tougaard, Surf. Interface Anal. 2002, 33, 238.
77. P. J. Cumpson, in Surface Analysis by Auger and X-Ray Photoelectron Spectroscopy (Eds: D. Briggs, J. T. Grant), IM Publications & Surface Spectra Ltd: Chichester, 2003, pp 651.
78. M. Novak, L. Kover, S. Egri, I. Cserny, J. Toth, D. Varga, W. Drube, J. Elec. Spec. Rel. Phenom. 2008, 163, 7.
79. A. Herrera-Gomez, F. S. Aguirre-Tostado, Y. Sun, R. Contreras-Guerrero, R. M. Wallace, Y. Hisao, E. Flint, Surf. Interface Anal. 2007, 39, 904.
80. K. Artyushkova, J. E. Fulghum, J. Electron Spectrosc. Relat. Phenom. 2001, 121, 33.
81. K. Artyushkova, J. E. Fulghum, Surf. Interface Anal. 2002, 33, 185.
82. K. Artyushkova, J. E. Fulghum, Surf. Interface Anal. 2004, 36, 1304.
83. S. Oswald, F. Oswald, Surf. Interface Anal. 2008, 40, 700.
84. Kozlowska, R. Reiche, S. Oswald, H. Vinzelberg, R. Ḧubner, K. Wetzig, Surf. Interface Anal. 2004, 36, 1600.
85. S. Oswald, F. Oswald, Phys. Stat. Sol. (c) 2006, 4, 2007.
86. S.-H. Yang, B. S. Mun, C. S. Fadley, Synchrotron Radiat. News 2004, 17, 24.
87. J. Zegenhagen, C. Kunz (eds), In Proceedings of the Workshop on Hard X-ray Photoelectron Spectroscopy: European Synchrotron Radiation Facility, Grenoble, France, September 11-12, 2003
88. K. Kobayashi, H. Nohira, L. Kover, Nuclear Instruments and Methods in Physics Research A 2005, 547, 1-235.
89. J. Kawai, M. Takami, M. Fujinami, Y. Hashiguchi, S. Hayakawa, Y. Gohshi, Spectrochim. Acta B 1992, 47, 983.
90. T. Jach, E. Landree, Surf. Interface Anal. 2001, 31, 768.
91. S.-H. Yang, B. S. Mun, A. W. Kay, S.-K. Kim, J. B. Kortright, J. H. Underwood, Z. Hussain, C. S. Fadley, Surf. Sci. Lett. 2000, 461, L557.
92. S.-H. Yang, B. S. Mun, N. Mannella, S.-K. Kim, J. B. Kortright, J. Underwood, F. Salmassi, E. Arenholz, A. Young, Z. Hussain, M. A. Van Hove, C. S. Fadley, J. Phys. Cond. Matt. 2002, 14, L406.
93. S.-H. Yang, B. C. Sell, C. S. Fadley, J. Appl. Phys. 2008, 103, 07C519.
94. C. S. Fadley, Nucl. Instrum. Methods A 2005, 547, 24.
95. H. Bluhm, D. Frank Ogletree, C. S. Fadley, Z. Hussain, M. Salmeron, J. Phys. Cond. Matt. 2002, 14(8), L227.
96. D. F. Ogletree, H. Bluhm, G. Lebedev, C. S. Fadley, Z. Hussain, M. Salmeron, Rev. Sci. Inst. 2002, 73, 3872.
97. Y. Enta, B. S. Mun, M. Rossi, C. S. Fadley, K.-S. Lee, S.-K. Kim, Z. Hussain, P. N. Ross, Appl. Phys. Lett. 2008, 92, 012110.
98. M. Rossi, B. S. Mun, Y. Enta, C. S. Fadley, K. S. Lee, S.-K. Kim, H.-J. Shin, Z. Hussain, P. N. Ross Jr, J. Appl. Phys. 2008, 103, 044104.
99. K. Kobayashi, M. Yabashi, Y. Takata, T. Tokushima, S. Shin, K. Tamasaku, D. Miwa, T. Ishikawa, Appl. Phys. Lett. 2003, 83, 1005.
100. K. Kobayashi, Nucl. Instrum. Methods A 2005, 547, 98.
101. Y. Takata, M. Yabashi, K. Tamasaku, Y. Nishino, D. Miwa, T. Ishikawa, E. Ikenaga, K. Horiba, S. Shin, M. Arita, K. Shimada, H. Namatame, M. Taniguchi, H. Nohira, T. Hattori, S. Södergren, B. Wannberg, K. Kobayashi, Nucl. Instrum. Methods A 2005, 547, 50.
102. K. Kobayashi, E. Ikenaga, J. J. Kim, M. Kobata, S. Ueda, in The Proceedings of Synchrotron Radiation Instrumentation 2006, AIP Conference Series 879 (Eds: J. Y. Choi, S. Rah) American Institute of Physics: Daegu, Korea, 28 May to 2 June, 2006 2007, p. 1539-1544.
103. C. G. Jin, Y. Sasaki, K. Okashita, B. Mizuno, M. Kobata, J. J. Kim, E. Ikenaga, K. Kobayashi. 7th International Workshop on Junction Technology, IEEE Catalog Number: 07EX1641C, IEEE Press: Kyoto, Japan, June 8-9, 2007, pp 49.
104. H.-S. P. Wong, IBM J. Res. Dev. 2002, 46, 133.
105. S. Shinagawa, H. Nohira, T. Ikuta, M. Hori, M. Kase, T. Hattori, Microelectron. Eng. 2005, 80, 98.
106. T. Hattori, H. Nohira, S. Shinagawa, M. Hori, M. Kase, T. Matuizumi, Microelectron. Reliab. 2007, 47, 20.
107. H. Nohira, S. Shinagawa, M. Kase, T. Maruizumi, T. Hattori, IEEE International conference on electron devices and solid state circuits, Proceedings Volume IEEE, Hong Kong, December 2005, pp 155, Catalog Number 05TH8831.
108. K. Hirose, H. Nohira, K. Azuma, T. Hattori, Prog. Surf. Sci. 2007, 82, 3.
109. T. Hattori, H. Nohira, K. Azuma, K. W. Sakai, K. Nakajima, M. Suzuki, K. Kimura, Y. Sugita, E. Ikenaga, K. Kobayashi, Y. Takata, H. Kondo, S. Zaima, Int. J. High Speed Elect. Sys. 2006, 16, 353.
110. M. Higuchi, S. Sugawa, E. Ikenaga, J. Ushio, H. Nohira, T. Maruizumi, A. Teramoto, T. Ohmi, T. Hattori, Appl. Phys. Lett. 2007, 90, 123114.