SCOPUS 정보 검색 플랫폼

Surface and Interface Analysis

Volumn 33, Issue 3, 2002, Pages 238-244

Comparison of the Tougaard, ARXPS, RBS and ellipsometry methods to determine the thickness of thin SiO2 layers

(3) Semak, B S a van der Marel, C b Tougaard, S a

a UNIVERSITY OF SOUTHERN DENMARK (Denmark)

b PHILIPS RESEARCH LABORATORIES (Netherlands)

Author keywords

ARXPS; Ellipsometry; RBS; SiO2 layers; Tougaard method; XPS

Indexed keywords

COMPUTER AIDED ANALYSIS; ELECTRON EMISSION; ELECTRON SCATTERING; ELLIPSOMETRY; MORPHOLOGY; MULTILAYERS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SILICA; SUBSTRATES; THICKNESS MEASUREMENT; X RAY PHOTOELECTRON SPECTROSCOPY;

ANGLE RESOLVED X RAY PHOTOELECTRON SPECTROSCOPY; INELASTIC MEAN FREE PATH; ROOT-MEAN-SQUARE DEVIATION; SOFTWARE PACKAGE QUASES-ARXPS; SOFTWARE PACKAGE QUASES-TOUGAARD; TOUGAARD METHODS;

SURFACES;

EID: 0036500245 PISSN: 01422421 EISSN: None Source Type: Journal
DOI: 10.1002/sia.1206 Document Type: Article

Times cited : (16)

References (22)

1
- 0034350496
- (2000) J. Vac. Sci. Technol. B , vol.18 , pp. 440
- Cole, D.A.¹ Shallenberger, J.R.² Novak, S.W.³ Moore, R.L.⁴

2
- 0024029261
- (1988) Surf. Interface Anal. , vol.11 , pp. 453
- Tougaard, S.¹

3
- 0024765243
- (1989) Surf. Interface Anal. , vol.14 , pp. 730
- Tougaard, S.¹ Hansen, H.S.²

4
- 0000216113
- (1996) J. Vac. Sci. Technol A , vol.14 , pp. 1415
- Tougaard, S.¹

5
- 0032047486
- (1998) Surf. Interface Anal. , vol.26 , pp. 249
- Tougaard, S.¹

6
- 0032715402
- (1999) Thin Solid Films , vol.338 , pp. 165
- Schleberger, M.¹ Simonsen, A.C.² Tougaard, S.³ Hansen, J.L.⁴ Larsen, A.N.⁵

7
- 3743086676
- (1974) J. Electron Spectrosc. , vol.4 , pp. 93
- Fadley, C.S.¹ Baird, R.J.² Siekhaus, W.³ Novakov, T.⁴ Bergström, S.Å.L.⁵

8
- 0027541454
- (1993) Surf. Interface Anal. , vol.20 , pp. 161
- Fulghum, J.E.¹

9
- 0003037887
- (1995) J. Electron Spectrosc. , vol.73 , pp. 25
- Cumpson, P.J.¹

10
- 0001803199
- (1999) J. Electron Spectrosc. , vol.100 , pp. 1
- Nefedov, V.I.¹

11
- 0004237995
- (Contact S. Tougaard for more information)
- (2000) QUASES-Tougaard: Software Package for Quantitative Analysis of Surfaces by Electron Spectroscopy, Version 4.4
- Tougaard, S.¹

12
- 0028387002
- (1993) Surf. Interface Anal. , vol.21 , pp. 165
- Tanuma, S.¹ Powell, C.J.² Penn, D.R.³

13
- 0008633488
- (Contact S. Tougaard for more information)
- (2001) QUASES-ARXPS: Software Package for Quantitative ARXPS, Version 1.01
- Lassen, T.S.¹ Tougaard, S.² Jablonski, A.³

14
- 0035838056
- Surf. Sci.
- (2001) , vol.481 , pp. 150
- Lassen, T.S.¹ Tougaard, S.² Jablonski, A.³

15
- 33746536779
- FitXPS: A Fitting Program for Core-Level Spectra
- Adams, D.¹ Andersen, J.N.²

16
- 0035306054
- (2001) Surf. Interface Anal. , vol.31 , pp. 328
- Suzuki, N.¹ Kato, T.² Tougaard, S.³

17
- 0034504403
- (2000) Surf. Interface Anal. , vol.29 , pp. 891
- Gross, T.¹ Lippitz, A.² Unger, W.³ Güttler, B.⁴

18
- 3242741763
- (1985) At. Data Nucl. Data Tables , vol.32 , pp. 1
- Yeh, J.J.¹ Lindau, I.²

19
- 17444437794
- (2001) J. Electron Spectrosc. , vol.114-116 , pp. 1139
- Powell, C.J.¹ Jablonski, A.²

20
- 0000204942
- (1995) J. Electron Spectrosc. , vol.74 , pp. 207
- Jablonski, A.¹ Tilinin, I.S.²

21
- 0031168751
- (1997) Surf. Interface Anal. , vol.25 , pp. 430
- Cumpson, P.J.¹ Seah, M.P.²

22
- 0035425735
- (2001) Surf. Sci. , vol.488 , pp. L547
- Powell, C.J.¹ Jablonski, A.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.