Thickogram: A method for easy film thickness measurement in XPS

Surface and Interface Analysis

Volumn 29, Issue 6, 2000, Pages 403-406

  Cumpson, Peter J ^a   Zalm, P C ^b  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

^b PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; ELASTICITY; KINETIC ENERGY; SCATTERING; THICKNESS MEASUREMENT; X RAY PHOTOELECTRON SPECTROSCOPY;

ELASTIC SCATTERING;

SURFACE PHENOMENA;

EID: 0033704906     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/1096-9918(200006)29:6<403::AID-SIA884>3.0.CO;2-8     Document Type: Article

References (15)

1. Fadley CS et al., J. Electron Spectrosc. 1974; 4: 93.
2. Hill JM et al., Chem. Phys. Lett. 1976; 44: 225.
3. Gunter PLJ, de Jong AM, Niemantsverdriet JW, Rheiter HJH. Surf. Interface Anal. 1992; 19: 161.
4. Mitchell DF et al., Surf. Interface Anal. 1994; 21: 44.
5. Fulghum JE et al., J. Electron Spectrosc. 1992; 60: 117.
6. Marcus P, Hinnen C, Olefjord I. Surf. Interface Anal. 1993; 20: 923.
7. Leavitt PK. Surf. Interface Anal. 1992; 18: 387.
8. Lewis AS. Nomography. Wiley: New York, 1959.
9. Cumpson PJ, Seah MP. Surf. Interface Anal. 1997; 25: 430.
10. Gunter PLJ, Gijzeman OLJ, Niemantsverdriet JW. Appl. Surf. Sci. 1997; 115: 342.
11. Zalm PC. Surf. Interface Anal. 1998; 26: 352.
12. Fulghum JE, Linton RW. Surf. Interface Anal. 1988; 13: 186.
13. Cumpson PJ. Surf. Interface Anal. 1997; 25: 447.
14. Jablonski A, Powell CJ. J. Vac. Sci. Technol. A 1997; 15: 2095.
15. Tanuma S, Powell CJ, Penn DR. Surf. Interface Anal. 1993; 21: 165.