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Volumn 87, Issue 9 I, 2000, Pages 4449-4455

Profiling nitrogen in ultrathin silicon oxynitrides with angle-resolved x-ray photoelectron spectroscopy

(11) Chang, J P a,c Green, M L a Donnelly, V M a Opila, R L a Eng Jr , J a Sapjeta, J a Silverman, P J a Weir, B a Lu, H C b Gustafsson, T b Garfunkel, E b

a LUCENT TECHNOLOGIES (United States)

b RUTGERS UNIVERSITY (United States)

c UNIVERSITY OF CALIFORNIA (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000944801 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.373090 Document Type: Article

Times cited : (138)

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