SCOPUS 정보 검색 플랫폼

Surface and Interface Analysis

Volumn 31, Issue 8, 2001, Pages 768-777

Grazing-incidence x-ray photoemission spectroscopy and the accuracy of thickness measurements of CMOS gate dielectrics

(2) Jach, Terrence a Landree, Eric a

a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY (United States)

Author keywords

GIXPS; Grazing incidence; Photoemission spectroscopy; TRXPS; X ray; XPS

Indexed keywords

LATTICE VIBRATIONS; OXIDES; PHOTOIONIZATION; REFRACTIVE INDEX; SURFACE ROUGHNESS; THICKNESS MEASUREMENT; X RAY PHOTOELECTRON SPECTROSCOPY;

GRAZING INCIDENCE; ULTRATHIN GATE DIELETRIC FILMS;

DIELECTRIC MATERIALS;

EID: 0035418959 PISSN: 01422421 EISSN: None Source Type: Journal
DOI: 10.1002/sia.1108 Document Type: Article

Times cited : (8)

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