Quantification of pinhole density in ultrathin diamond-like carbon films

Surface and Interface Analysis

Volumn 39, Issue 12-13, 2007, Pages 904-907

  Herrera Gomez, A ^a,b   Aguirre Tostado, F S ^a   Sun, Y ^c   Contreras Guerrero, R ^b   Wallace, R M ^a   Hisao, Y ^c   Flint, E ^c  

^a The University of Texas at Dallas   (United States)

^b DEPARTAMENTO DE FÍSICA   (Mexico)

^c SAN JOSE RESEARCH CENTER   (United States)

Author keywords

ARXPS; Carbon protective film; Disk drive; DLC; FCA; Pinhole density

Indexed keywords

FILM THICKNESS; OXIDATION; SILICON WAFERS; SPURIOUS SIGNAL NOISE; ULTRATHIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

ARXPS; CARBON PROTECTIVE FILMS; DISK DRIVES; DLC; FCA; PINHOLE DENSITY;

DIAMOND LIKE CARBON FILMS;

EID: 38549083295     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2622     Document Type: Article

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