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Volumn 80, Issue SUPPL., 2005, Pages 98-101

Angle-resolved XPS study on chemical bonds in ultrathin silicon oxynitride films

Author keywords

Chemical bonds; Composition; Depth profile; Oxynitride; XPS

Indexed keywords

CARRIER MOBILITY; CHEMICAL BONDS; COMPOSITION; ENTROPY; NITRIDING; NONDESTRUCTIVE EXAMINATION; PLASMA APPLICATIONS; SILICON COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 19944362863     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2005.04.049     Document Type: Conference Paper
Times cited : (24)

References (10)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.