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Volumn 80, Issue SUPPL., 2005, Pages 98-101
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Angle-resolved XPS study on chemical bonds in ultrathin silicon oxynitride films
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Author keywords
Chemical bonds; Composition; Depth profile; Oxynitride; XPS
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Indexed keywords
CARRIER MOBILITY;
CHEMICAL BONDS;
COMPOSITION;
ENTROPY;
NITRIDING;
NONDESTRUCTIVE EXAMINATION;
PLASMA APPLICATIONS;
SILICON COMPOUNDS;
X RAY PHOTOELECTRON SPECTROSCOPY;
DECONVOLUTION;
DEPTH PROFILE;
GATE DIELECTRICS;
OXYNITRIDE;
ULTRATHIN FILMS;
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EID: 19944362863
PISSN: 01679317
EISSN: None
Source Type: Journal
DOI: 10.1016/j.mee.2005.04.049 Document Type: Conference Paper |
Times cited : (24)
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References (10)
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