Radiation effects in micro-electromechanical systems (MEMS): RF relays

IEEE Transactions on Nuclear Science

Volumn 49 I, Issue 6, 2002, Pages 3197-3202

  McClure, Steven S ^a   Edmonds, L D ^a   Mihailovich, R ^b   Johnston, A H ^a   Alonzo, P ^a   DeNatale, J ^b   Lehman, J ^a   Yui, C ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b ROCKWELL SCIENTIFIC COMPANY   (United States)

Author keywords

Micro electromechanical devices; Radiation effects; RF switch

Indexed keywords

ACTUATORS; ARSENIC; DIELECTRIC MATERIALS; ELECTRIC POTENTIAL; ELECTRIC RELAYS; ELECTRIC SWITCHES; ELECTROSTATICS; FABRICATION; IONIZATION; MICROMACHINING; RADIATION EFFECTS; SEMICONDUCTING GALLIUM;

DIELECTRIC CHARGE TRAPPING;

MICROELECTROMECHANICAL DEVICES;

EID: 0036947938     PISSN: 00189499     EISSN: None     Source Type: Journal    
DOI: 10.1109/TNS.2002.805406     Document Type: Conference Paper

References (10)

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