A high-aspect-ratio two-axis electrostatic microactuator with extended travel range

Sensors and Actuators, A: Physical

Volumn 102, Issue 1-2, 2002, Pages 49-60

  Sun, Yu ^a   Piyabongkarn, D ^a   Sezen, A ^a   Nelson, B J ^a   Rajamani, R ^a  

^a University of Minnesota   (United States)

Author keywords

DRIE; Electrostatic actuation; Microactuator; Nonlinear control; SOI

Indexed keywords

ASPECT RATIO; ATOMIC FORCE MICROSCOPY; MICROELECTROMECHANICAL DEVICES; NONLINEAR CONTROL SYSTEMS; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

DEEP REACTIVE ION ETCHING (DRIE);

ELECTROSTATIC ACTUATORS;

EID: 0036897550     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00298-4     Document Type: Article

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